TY - JOUR
T1 - Phase-locked substrate rotation
T2 - Proceedings of the 1998 10th International Conference on Molecular Beam Epitaxy (MBE-X)
AU - Braun, W.
AU - Möller, H.
AU - Zhang, Yong-Hang
N1 - Funding Information:
The authors would like to thank C.-H. Kuo for some MBE growth. This work was supported by a DARPA program (contract number MDA972-95-1-0016) managed by G. Pomrenke.
PY - 1999/5
Y1 - 1999/5
N2 - By locking the sampling frequency of reflection high-energy electron diffraction (RHEED) data acquisition and substrate rotation to the same timebase, several new measurement modes become possible that dramatically enhance the capabilities of RHEED with rotating substrates. Gated detection allows the display of quasi-static RHEED patterns during continuous rotation, azimuthal scans produce two-dimensional cuts through reciprocal space similar to low-energy electron diffraction (LEED), and measurements of the FWHM of the specular spot perpendicular to the substrate surface allow growth rate calibrations with unprecedented accuracy.
AB - By locking the sampling frequency of reflection high-energy electron diffraction (RHEED) data acquisition and substrate rotation to the same timebase, several new measurement modes become possible that dramatically enhance the capabilities of RHEED with rotating substrates. Gated detection allows the display of quasi-static RHEED patterns during continuous rotation, azimuthal scans produce two-dimensional cuts through reciprocal space similar to low-energy electron diffraction (LEED), and measurements of the FWHM of the specular spot perpendicular to the substrate surface allow growth rate calibrations with unprecedented accuracy.
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U2 - 10.1016/S0022-0248(98)01277-9
DO - 10.1016/S0022-0248(98)01277-9
M3 - Conference article
AN - SCOPUS:0344614028
SN - 0022-0248
VL - 201
SP - 50
EP - 55
JO - Journal of Crystal Growth
JF - Journal of Crystal Growth
Y2 - 31 August 1998 through 4 September 1998
ER -