Phase-locked substrate rotation: New applications for RHEED in MBE growth

W. Braun, H. Möller, Yong-Hang Zhang

Research output: Contribution to journalConference articlepeer-review

5 Scopus citations

Abstract

By locking the sampling frequency of reflection high-energy electron diffraction (RHEED) data acquisition and substrate rotation to the same timebase, several new measurement modes become possible that dramatically enhance the capabilities of RHEED with rotating substrates. Gated detection allows the display of quasi-static RHEED patterns during continuous rotation, azimuthal scans produce two-dimensional cuts through reciprocal space similar to low-energy electron diffraction (LEED), and measurements of the FWHM of the specular spot perpendicular to the substrate surface allow growth rate calibrations with unprecedented accuracy.

Original languageEnglish (US)
Pages (from-to)50-55
Number of pages6
JournalJournal of Crystal Growth
Volume201
DOIs
StatePublished - May 1999
EventProceedings of the 1998 10th International Conference on Molecular Beam Epitaxy (MBE-X) - Cannes
Duration: Aug 31 1998Sep 4 1998

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Inorganic Chemistry
  • Materials Chemistry

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