PH measurements with ZvO based Surface Acoustic Wave Resonator

R. Tang, X. Qiu, J. Zhu, J. Oiler, H. Huang, H. Wang, H. Yu

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Scopus citations

Abstract

This paper investigated pH measurements using ZnO based Surface Acoustic Wave Resonator (SAW). The resonant frequency of the SAW decreased as pH changed from 7 to 2 (acid region) or from 7 to 12 (alkaline region). The detection limits were 0.03 and 0.02 pH change, respectively, which were comparable to commercial pH meters. The interaction between hydronium (H3O +) or hydroxide (OH-) and ZnO was proposed to be responsible for the frequency drop. Both hydronium and hydroxide can increase the conductivity of the ZnO film, resulting in the resonant frequency decrease due to the acoustoelectric effect.

Original languageEnglish (US)
Title of host publication2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
Pages1132-1135
Number of pages4
DOIs
StatePublished - Sep 1 2011
Event2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 - Beijing, China
Duration: Jun 5 2011Jun 9 2011

Publication series

Name2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11

Other

Other2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
CountryChina
CityBeijing
Period6/5/116/9/11

Keywords

  • ZnO
  • acoustoelectric effect
  • pH
  • surface acoustic wave resonator

ASJC Scopus subject areas

  • Hardware and Architecture
  • Electrical and Electronic Engineering

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  • Cite this

    Tang, R., Qiu, X., Zhu, J., Oiler, J., Huang, H., Wang, H., & Yu, H. (2011). PH measurements with ZvO based Surface Acoustic Wave Resonator. In 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 (pp. 1132-1135). [5969292] (2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11). https://doi.org/10.1109/TRANSDUCERS.2011.5969292