PH measurements with ZvO based Surface Acoustic Wave Resonator

R. Tang, X. Qiu, J. Zhu, J. Oiler, H. Huang, H. Wang, H. Yu

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

This paper investigated pH measurements using ZnO based Surface Acoustic Wave Resonator (SAW). The resonant frequency of the SAW decreased as pH changed from 7 to 2 (acid region) or from 7 to 12 (alkaline region). The detection limits were 0.03 and 0.02 pH change, respectively, which were comparable to commercial pH meters. The interaction between hydronium (H3O +) or hydroxide (OH-) and ZnO was proposed to be responsible for the frequency drop. Both hydronium and hydroxide can increase the conductivity of the ZnO film, resulting in the resonant frequency decrease due to the acoustoelectric effect.

Original languageEnglish (US)
Title of host publication2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
Pages1132-1135
Number of pages4
DOIs
StatePublished - 2011
Event2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 - Beijing, China
Duration: Jun 5 2011Jun 9 2011

Other

Other2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
CountryChina
CityBeijing
Period6/5/116/9/11

Fingerprint

Surface waves
Resonators
Natural frequencies
Acoustoelectric effects
pH meters
Acoustic waves
Acids

Keywords

  • acoustoelectric effect
  • pH
  • surface acoustic wave resonator
  • ZnO

ASJC Scopus subject areas

  • Hardware and Architecture
  • Electrical and Electronic Engineering

Cite this

Tang, R., Qiu, X., Zhu, J., Oiler, J., Huang, H., Wang, H., & Yu, H. (2011). PH measurements with ZvO based Surface Acoustic Wave Resonator. In 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 (pp. 1132-1135). [5969292] https://doi.org/10.1109/TRANSDUCERS.2011.5969292

PH measurements with ZvO based Surface Acoustic Wave Resonator. / Tang, R.; Qiu, X.; Zhu, J.; Oiler, J.; Huang, H.; Wang, H.; Yu, H.

2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11. 2011. p. 1132-1135 5969292.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Tang, R, Qiu, X, Zhu, J, Oiler, J, Huang, H, Wang, H & Yu, H 2011, PH measurements with ZvO based Surface Acoustic Wave Resonator. in 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11., 5969292, pp. 1132-1135, 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11, Beijing, China, 6/5/11. https://doi.org/10.1109/TRANSDUCERS.2011.5969292
Tang R, Qiu X, Zhu J, Oiler J, Huang H, Wang H et al. PH measurements with ZvO based Surface Acoustic Wave Resonator. In 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11. 2011. p. 1132-1135. 5969292 https://doi.org/10.1109/TRANSDUCERS.2011.5969292
Tang, R. ; Qiu, X. ; Zhu, J. ; Oiler, J. ; Huang, H. ; Wang, H. ; Yu, H. / PH measurements with ZvO based Surface Acoustic Wave Resonator. 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11. 2011. pp. 1132-1135
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