Abstract

We demonstrate spiral inductors with continuous Permalloy ring structure at 100-μm scale, which achieve enhancements of sixfold in inductance and threefold in quality factor at frequencies as high as 200 MHz. The roll-off frequency is due to the eddy current loss in the conductive magnetic material. To reduce such loss and tune the permeability, the Permalloy film is laminated and split into bars. The dependence of the inductance and quality factor on permeability is further investigated. Different types of spiral inductors were fabricated with magnetic rings, helping shed light on optimization strategy.

Original languageEnglish (US)
Article number5660072
Pages (from-to)69-71
Number of pages3
JournalIEEE Electron Device Letters
Volume32
Issue number1
DOIs
Publication statusPublished - Jan 2011

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Keywords

  • Eddy current
  • ferromagnetic resonance
  • inductance density
  • lamination
  • magnetic ring
  • Permalloy
  • permeability
  • spiral inductor

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials

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