PE-MOCVD of dielectric thin films: Challenges and opportunities

Sandwip Dey; Prasad V. Alluri

doi:10.1557/S0883769400046078

PE-MOCVD of dielectric thin films: Challenges and opportunities

Sandwip Dey, Prasad V. Alluri

Chemical Engineering

Research output: Contribution to journal › Article › peer-review

25 Scopus citations

Original language	English (US)
Pages (from-to)	44-48
Number of pages	5
Journal	MRS Bulletin
Volume	21
Issue number	6
DOIs	https://doi.org/10.1557/S0883769400046078
State	Published - Jun 1996

ASJC Scopus subject areas

General Materials Science
Condensed Matter Physics
Physical and Theoretical Chemistry

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title = "PE-MOCVD of dielectric thin films: Challenges and opportunities",

author = "Sandwip Dey and Alluri, {Prasad V.}",

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PE-MOCVD of dielectric thin films: Challenges and opportunities

ASJC Scopus subject areas

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