PE-MOCVD of dielectric thin films: Challenges and opportunities

Sandwip Dey, Prasad V. Alluri

Research output: Contribution to journalArticle

23 Scopus citations
Original languageEnglish (US)
Pages (from-to)44-48
Number of pages5
JournalMRS Bulletin
Volume21
Issue number6
DOIs
StatePublished - Jun 1996

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Physical and Theoretical Chemistry

Cite this