Parallel Integrated Emitter/Detector Inspection Systems (PIEDIS)

Yong-Hang Zhang (Inventor)

Research output: Patent


partial sponsor obligation ... no exec summary needed ... note that emitter/detector background technology was developed separately by zhang and incorporated into PIEDIS system ... therefore, notice sent to consortium was specific to overall system and indicated that emitter/detector was separate background technology outside of consortuim agreement ... see notification letter for detail
Original languageEnglish (US)
StatePublished - Jan 1 1900


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