Packaging and non-hermetic encapsulation technology for flip chip on implantable MEMS devices

Jemmy Sutanto, Sindhu Anand, Arati Sridharan, Robert Korb, Li Zhou, Michael S. Baker, Murat Okandan, Jitendran Muthuswamy

Research output: Contribution to journalArticle

8 Scopus citations

Abstract

We report here a successful demonstration of a flip-chip packaging approach for a microelectromechanical systems (MEMS) device with in-plane movable microelectrodes implanted in a rodent brain. The flip-chip processes were carried out using a custom-made apparatus that was capable of the following: 1) creating Ag epoxy microbumps for first-level interconnect; 2) aligning the die and the glass substrate; and 3) creating nonhermetic encapsulation (NHE). The completed flip-chip package had an assembled weight of only 0.5 g significantly less than the previously designed wire-bonded package of 4.5 g. The resistance of the Ag bumps was found to be negligible. The MEMS microelectrodes were successfully tested for its mechanical movement with microactuators generating forces of 450 μ N with a displacement resolution of 8.8 μ m. An NHE on the front edge of the package was created by patterns of hydrophobic silicone microstructures to prevent contamination from cerebrospinal fluid while simultaneously allowing the microelectrodes to move in and out of the package boundary. The breakdown pressure of the NHE was found to be 80 cm of water, which is significantly (4.5-11 times) larger than normal human intracranial pressures. Bench top tests and in vivo tests of the MEMS flip-chip packages for up to 75 days showed reliable NHE for potential long-term implantation.

Original languageEnglish (US)
Article number6182573
Pages (from-to)882-896
Number of pages15
JournalJournal of Microelectromechanical Systems
Volume21
Issue number4
DOIs
StatePublished - Apr 17 2012

Keywords

  • Actuators
  • biomedical microelectromechanical systems (MEMS) (bio-MEMS)
  • flip chip
  • hydrophobic silicone
  • microactuators

ASJC Scopus subject areas

  • Mechanical Engineering
  • Electrical and Electronic Engineering

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