Ozone senosr using ZnO based film bulk acoustic resonator

Z. Wang, X. Qiu, R. Tang, J. Oiler, J. Zhu, H. Huang, H. Wang, J. Shi, H. Yu

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Scopus citations

Abstract

This abstract describes room temperature ozone sensing using a ZnO based film bulk acoustic resonator (FBAR). The resonant frequency of the FBAR decreased upon ozone exposure due to the density increase of the ZnO film. Ozone can be adsorbed on the ZnO surface by capturing free electrons from the film, which increases the film density. The minimum detectable concentration is 21 ppb (parts per billion) with a response time of 12 s. An analytical model was developed to predict the relationship between resonant frequency and ozone concentration. In agreement with the experiment, a hyperbolic function was obtained.

Original languageEnglish (US)
Title of host publication2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
Pages1124-1127
Number of pages4
DOIs
StatePublished - Sep 1 2011
Event2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 - Beijing, China
Duration: Jun 5 2011Jun 9 2011

Publication series

Name2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11

Other

Other2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
CountryChina
CityBeijing
Period6/5/116/9/11

Keywords

  • FBAR
  • Ozone sensor
  • ZnO

ASJC Scopus subject areas

  • Hardware and Architecture
  • Electrical and Electronic Engineering

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  • Cite this

    Wang, Z., Qiu, X., Tang, R., Oiler, J., Zhu, J., Huang, H., Wang, H., Shi, J., & Yu, H. (2011). Ozone senosr using ZnO based film bulk acoustic resonator. In 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 (pp. 1124-1127). [5969275] (2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11). https://doi.org/10.1109/TRANSDUCERS.2011.5969275