Abstract
This abstract describes room temperature ozone sensing using a ZnO based film bulk acoustic resonator (FBAR). The resonant frequency of the FBAR decreased upon ozone exposure due to the density increase of the ZnO film. Ozone can be adsorbed on the ZnO surface by capturing free electrons from the film, which increases the film density. The minimum detectable concentration is 21 ppb (parts per billion) with a response time of 12 s. An analytical model was developed to predict the relationship between resonant frequency and ozone concentration. In agreement with the experiment, a hyperbolic function was obtained.
| Original language | English (US) |
|---|---|
| Title of host publication | 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 |
| Pages | 1124-1127 |
| Number of pages | 4 |
| DOIs | |
| State | Published - 2011 |
| Event | 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 - Beijing, China Duration: Jun 5 2011 → Jun 9 2011 |
Other
| Other | 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 |
|---|---|
| Country | China |
| City | Beijing |
| Period | 6/5/11 → 6/9/11 |
Fingerprint
Keywords
- FBAR
- Ozone sensor
- ZnO
ASJC Scopus subject areas
- Hardware and Architecture
- Electrical and Electronic Engineering
Cite this
Ozone senosr using ZnO based film bulk acoustic resonator. / Wang, Z.; Qiu, X.; Tang, R.; Oiler, J.; Zhu, J.; Huang, H.; Wang, H.; Shi, J.; Yu, H.
2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11. 2011. p. 1124-1127 5969275.Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
}
TY - GEN
T1 - Ozone senosr using ZnO based film bulk acoustic resonator
AU - Wang, Z.
AU - Qiu, X.
AU - Tang, R.
AU - Oiler, J.
AU - Zhu, J.
AU - Huang, H.
AU - Wang, H.
AU - Shi, J.
AU - Yu, H.
PY - 2011
Y1 - 2011
N2 - This abstract describes room temperature ozone sensing using a ZnO based film bulk acoustic resonator (FBAR). The resonant frequency of the FBAR decreased upon ozone exposure due to the density increase of the ZnO film. Ozone can be adsorbed on the ZnO surface by capturing free electrons from the film, which increases the film density. The minimum detectable concentration is 21 ppb (parts per billion) with a response time of 12 s. An analytical model was developed to predict the relationship between resonant frequency and ozone concentration. In agreement with the experiment, a hyperbolic function was obtained.
AB - This abstract describes room temperature ozone sensing using a ZnO based film bulk acoustic resonator (FBAR). The resonant frequency of the FBAR decreased upon ozone exposure due to the density increase of the ZnO film. Ozone can be adsorbed on the ZnO surface by capturing free electrons from the film, which increases the film density. The minimum detectable concentration is 21 ppb (parts per billion) with a response time of 12 s. An analytical model was developed to predict the relationship between resonant frequency and ozone concentration. In agreement with the experiment, a hyperbolic function was obtained.
KW - FBAR
KW - Ozone sensor
KW - ZnO
UR - http://www.scopus.com/inward/record.url?scp=80052130588&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=80052130588&partnerID=8YFLogxK
U2 - 10.1109/TRANSDUCERS.2011.5969275
DO - 10.1109/TRANSDUCERS.2011.5969275
M3 - Conference contribution
AN - SCOPUS:80052130588
SN - 9781457701573
SP - 1124
EP - 1127
BT - 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
ER -