Ozone senosr using ZnO based film bulk acoustic resonator

Z. Wang; X. Qiu; R. Tang; J. Oiler; J. Zhu; H. Huang; H. Wang; J. Shi; H. Yu

doi:10.1109/TRANSDUCERS.2011.5969275

Ozone senosr using ZnO based film bulk acoustic resonator

Z. Wang, X. Qiu, R. Tang, J. Oiler, J. Zhu, H. Huang, H. Wang, J. Shi, H. Yu

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

1 Scopus citations

Abstract

This abstract describes room temperature ozone sensing using a ZnO based film bulk acoustic resonator (FBAR). The resonant frequency of the FBAR decreased upon ozone exposure due to the density increase of the ZnO film. Ozone can be adsorbed on the ZnO surface by capturing free electrons from the film, which increases the film density. The minimum detectable concentration is 21 ppb (parts per billion) with a response time of 12 s. An analytical model was developed to predict the relationship between resonant frequency and ozone concentration. In agreement with the experiment, a hyperbolic function was obtained.

Original language	English (US)
Title of host publication	2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
Pages	1124-1127
Number of pages	4
DOIs	https://doi.org/10.1109/TRANSDUCERS.2011.5969275
State	Published - Sep 1 2011
Event	2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 - Beijing, China Duration: Jun 5 2011 → Jun 9 2011

Publication series

Name	2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11

Other

Other	2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
Country	China
City	Beijing
Period	6/5/11 → 6/9/11

Keywords

FBAR
Ozone sensor
ZnO

ASJC Scopus subject areas

Hardware and Architecture
Electrical and Electronic Engineering

Access to Document

10.1109/TRANSDUCERS.2011.5969275

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Cite this

Wang, Z., Qiu, X., Tang, R., Oiler, J., Zhu, J., Huang, H., Wang, H., Shi, J., & Yu, H. (2011). Ozone senosr using ZnO based film bulk acoustic resonator. In 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 (pp. 1124-1127). [5969275] (2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11). https://doi.org/10.1109/TRANSDUCERS.2011.5969275

Ozone senosr using ZnO based film bulk acoustic resonator. / Wang, Z.; Qiu, X.; Tang, R.; Oiler, J.; Zhu, J.; Huang, H.; Wang, H.; Shi, J.; Yu, H.

2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11. 2011. p. 1124-1127 5969275 (2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Wang, Z, Qiu, X, Tang, R, Oiler, J, Zhu, J, Huang, H, Wang, H, Shi, J & Yu, H 2011, Ozone senosr using ZnO based film bulk acoustic resonator. in 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11., 5969275, 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11, pp. 1124-1127, 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11, Beijing, China, 6/5/11. https://doi.org/10.1109/TRANSDUCERS.2011.5969275

Wang Z, Qiu X, Tang R, Oiler J, Zhu J, Huang H et al. Ozone senosr using ZnO based film bulk acoustic resonator. In 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11. 2011. p. 1124-1127. 5969275. (2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11). https://doi.org/10.1109/TRANSDUCERS.2011.5969275

Wang, Z. ; Qiu, X. ; Tang, R. ; Oiler, J. ; Zhu, J. ; Huang, H. ; Wang, H. ; Shi, J. ; Yu, H. / Ozone senosr using ZnO based film bulk acoustic resonator. 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11. 2011. pp. 1124-1127 (2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11).

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