OXYGEN IMPLANTED LAYERS IN SILICON ELECTRICAL AND MICROSTRUCTURAL CHARACTERIZATION.

C. J. Varker, S. R. Wilson, S. S. Chan, J. D. Whitfield, S. J. Krause

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Scopus citations

Abstract

We report on an investigation of 'buried' oxygen implants formed by O** plus implantation at 400 keV and 3. 5 MeV into p-type CZ (100) wafers with a dopant density N//A approximately equals 10**1**5 cm** minus **3. Peak concentrations of 1 multiplied by 10**1**9 cm** minus **3 to 2 multiplied by 10**2**0 cm** minus **3. were investigated. Test devices were fabricated on implanted and annealed wafers using conventional wafer processing. TEM analysis reveals a well defined layer at 1 mu m with respect to the original implant surface containing a relatively high density of small precipitates and dislocation loops. DLTS measurements on diodes reveal 2 electron traps designated as E1 and E2. The experimental results provide direct evidence that ion implantation provides an effective method of introducing atomic oxygen in silicon at concentration exceeding its solid solubility during processing to produce a buried low lifetime region.

Original languageEnglish (US)
Title of host publicationMaterials Research Society Symposia Proceedings
EditorsB.R. Appleton, F.H. Eisen, T.W. Sigmon
PublisherMaterials Research Soc
Pages129-134
Number of pages6
ISBN (Print)0931837103
StatePublished - Dec 1 1985
Externally publishedYes

Publication series

NameMaterials Research Society Symposia Proceedings
Volume45
ISSN (Print)0272-9172

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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  • Cite this

    Varker, C. J., Wilson, S. R., Chan, S. S., Whitfield, J. D., & Krause, S. J. (1985). OXYGEN IMPLANTED LAYERS IN SILICON ELECTRICAL AND MICROSTRUCTURAL CHARACTERIZATION. In B. R. Appleton, F. H. Eisen, & T. W. Sigmon (Eds.), Materials Research Society Symposia Proceedings (pp. 129-134). (Materials Research Society Symposia Proceedings; Vol. 45). Materials Research Soc.