Abstract

When a film bulk acoustic resonator (FBAR) is coupled to a liquid layer with thickness comparable to the acoustic wavelength, the Q factor varies in a damped oscillatory pattern with the liquid thickness. This letter reports an analytical modeling and experimental demonstration of this behavior by integrating microfluidic channels to MEMS-based FBARs. It is found that Q assumes its maxima and minima when the channel thickness is an odd multiple of quarter-wavelength and a multiple of half-wavelength, respectively. The microfluidics integrated FBARs achieve a 10 × improvement of Q over fully immersed FBARs, showing the potential of use as high-resolution sensors involving liquids.

Original languageEnglish (US)
Article number5742672
Pages (from-to)2342-2343
Number of pages2
JournalIEEE Sensors Journal
Volume11
Issue number10
DOIs
StatePublished - 2011

Fingerprint

Acoustic resonators
Microfluidics
Q factors
resonators
Wavelength
acoustics
Liquids
liquids
wavelengths
microelectromechanical systems
MEMS
Demonstrations
Acoustics
high resolution
sensors
Sensors

Keywords

  • Acoustic resonators
  • microfluidic channel
  • piezoelectric transducers
  • Q-factor

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Instrumentation

Cite this

Oscillatory Q factor in film bulk acoustic resonators with integrated microfluidic channels. / Xu, Wencheng; Abbaspour-Tamijani, Abbas; Chae, Junseok.

In: IEEE Sensors Journal, Vol. 11, No. 10, 5742672, 2011, p. 2342-2343.

Research output: Contribution to journalArticle

Xu, Wencheng ; Abbaspour-Tamijani, Abbas ; Chae, Junseok. / Oscillatory Q factor in film bulk acoustic resonators with integrated microfluidic channels. In: IEEE Sensors Journal. 2011 ; Vol. 11, No. 10. pp. 2342-2343.
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