Oscillating behavior of quality factor of a film bulk acoustic resonator in liquids

W. Xu, A. Abbaspour-Tamijani, Junseok Chae

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Scopus citations

Abstract

When a film bulk acoustic resonator (FBAR) is coupled to a thin liquid layer, the quality factor (Q) of the resonator varies in a damped oscillatory pattern versus the liquid thickness. This paper reports this behavior with an analytical modeling and experimental demonstration of it. The thin liquid layer with thickness comparable to the acoustic wavelength is realized by integrating a microfluidic channel to the FBAR. Q assumes its maxima (up to 150) and minima (as low as 50) when the channel thickness is an odd multiple of quarter-wavelength and a multiple of half-wavelength, respectively. We also present a bio-molecular detection test for aptamer immobilization and thrombin binding as a proof-of-concept sensing application.

Original languageEnglish (US)
Title of host publicationTRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems
Pages696-699
Number of pages4
DOIs
StatePublished - Dec 14 2009
EventTRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems - Denver, CO, United States
Duration: Jun 21 2009Jun 25 2009

Publication series

NameTRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems

Other

OtherTRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems
CountryUnited States
CityDenver, CO
Period6/21/096/25/09

Keywords

  • Film bulk acoustic resonator (FBAR)
  • Microfluidics
  • Q factor

ASJC Scopus subject areas

  • Hardware and Architecture
  • Electrical and Electronic Engineering

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