Origins of high spatial resolution secondary electron microscopy

M. R. Scheinfein, Jeffery Drucker, Jingyue Liu, J. K. Weiss, G. G. Hembree, J. M. Cowley

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Scopus citations

Abstract

The secondary electron generation process is studied in an ultra-high vacuum scanning transmission electron microscope using electron coincidence spectroscopy. Production pathways for secondary electrons are determined by analyzing coincidences between secondary electrons and individual excitation events. The ultimate spatial resolution available in scanning electron microscopy is limited by the delocalization of the secondary electron generation process. This delocalization is studied using momentum resolved coincidence electron spectroscopy. The fraction of secondary electrons resulting from localized excitations can explain the high spatial resolution observed in secondary electron microscopy images.

Original languageEnglish (US)
Title of host publicationMaterials Research Society Symposium Proceedings
PublisherPubl by Materials Research Society
Pages253-259
Number of pages7
ISBN (Print)1558991905
StatePublished - Jan 1 1993
EventSymposium on Atomic-scale Imaging of Surfaces and Interfaces -
Duration: Nov 30 1992Dec 2 1992

Publication series

NameMaterials Research Society Symposium Proceedings
Volume295
ISSN (Print)0272-9172

Other

OtherSymposium on Atomic-scale Imaging of Surfaces and Interfaces
Period11/30/9212/2/92

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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  • Cite this

    Scheinfein, M. R., Drucker, J., Liu, J., Weiss, J. K., Hembree, G. G., & Cowley, J. M. (1993). Origins of high spatial resolution secondary electron microscopy. In Materials Research Society Symposium Proceedings (pp. 253-259). (Materials Research Society Symposium Proceedings; Vol. 295). Publ by Materials Research Society.