Abstract
The paper examines the SE generation pathway by correlating SE of a given energy produced by an initial inelastic excitation using time coincidence detection. The experiments were performed in a Vacuum Generators HB 501-S UHV scanning transmission electron microscope (STEM), operating at base pressures of 5 × 10 -11 torr. The microscope is equipped with an electron energy loss spectroscopy (EELS). Using the parallelizer principle, surface microanalysis is performed within the magnetic field of the objective lens. Time correlation spectra (TCS) are formed by starting the timing electronics with EELS pulses, and using the delayed SE pulses to gate the stop. EELS, coincidence and generation probability spectra for p-type (n n = 10 15 cm -3) Si〈111〉 are presented.
| Original language | English (US) |
|---|---|
| Title of host publication | Proceedings - Annual Meeting, Microscopy Society of America |
| Publisher | Publ by San Francisco Press Inc |
| Pages | 766-767 |
| Number of pages | 2 |
| State | Published - 1993 |
| Event | Proceedings of the 51st Annual Meeting Microscopy Society of America - Cincinnati, OH, USA Duration: Aug 1 1993 → Aug 6 1993 |
Other
| Other | Proceedings of the 51st Annual Meeting Microscopy Society of America |
|---|---|
| City | Cincinnati, OH, USA |
| Period | 8/1/93 → 8/6/93 |
ASJC Scopus subject areas
- General Engineering