Origins of high-resolution secondary-electron microscopy

M. R. Scheinfein, Jeffery Drucker, J. K. Weiss

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

The paper examines the SE generation pathway by correlating SE of a given energy produced by an initial inelastic excitation using time coincidence detection. The experiments were performed in a Vacuum Generators HB 501-S UHV scanning transmission electron microscope (STEM), operating at base pressures of 5 × 10 -11 torr. The microscope is equipped with an electron energy loss spectroscopy (EELS). Using the parallelizer principle, surface microanalysis is performed within the magnetic field of the objective lens. Time correlation spectra (TCS) are formed by starting the timing electronics with EELS pulses, and using the delayed SE pulses to gate the stop. EELS, coincidence and generation probability spectra for p-type (n n = 10 15 cm -3) Si〈111〉 are presented.

Original languageEnglish (US)
Title of host publicationProceedings - Annual Meeting, Microscopy Society of America
PublisherPubl by San Francisco Press Inc
Pages766-767
Number of pages2
StatePublished - 1993
EventProceedings of the 51st Annual Meeting Microscopy Society of America - Cincinnati, OH, USA
Duration: Aug 1 1993Aug 6 1993

Other

OtherProceedings of the 51st Annual Meeting Microscopy Society of America
CityCincinnati, OH, USA
Period8/1/938/6/93

ASJC Scopus subject areas

  • Engineering(all)

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