Optimized process for fabrication of SrBi₂Ta₂O₉ thin films using a novel chemical solution deposition technique

Engineering & Materials Science

• Alkanolamines 100%
• Thin films 56%
• Ferroelectric thin films 52%
• Remanence 45%
• Fabrication 44%
• Ferroelectric materials 39%
• Crystallinity 36%
• Hydrolysis 36%
• Leakage currents 32%
• Condensation 30%
• Annealing 29%
• Current density 29%
• Fatigue of materials 20%
• Microstructure 20%
• Data storage equipment 18%
• Electric potential 15%
• Temperature 12%

Chemical Compounds

• Chemical Solution Deposition 87%
• Deposition Technique 65%
• Leakage Current 26%
• Annealing 15%
• Crystallinity 15%
• Polarization 15%
• Current Density 14%
• Condensation 14%
• Voltage 14%
• Microstructure 13%
• Hydrolysis 12%
• Liquid Film 9%
• Application 6%

Physics & Astronomy

• fabrication 36%
• thin films 30%
• hydrolysis 22%
• low voltage 19%
• crystallinity 17%
• condensation 17%
• leakage 16%
• retarding 15%
• current density 14%
• saturation 13%
• cycles 13%
• annealing 12%
• microstructure 11%
• polarization 10%
• temperature 5%