Highly transparent conductive composite electrodes made of multilayer of TiO2 and Cu (TiO2/Cu/ TiO2) thin films (30/3-9/30 nm thick) are deposited onto flexible substrates at room temperature. The micro-structural, optical and electrical properties of the multilayer are studied with the use of atomic force microscopy, uv-visible spectrophotometry and Hall measurement tool. The Haacke figure of merit (FOM) has been calculated to evaluate the performance of the multilayer films. The highest FOM achieved is 6.4×10-3 Ω -1 for a Cu thickness of 6 nm with a sheet resistance of 19 Ω/sq and an average transmittance of 81%.
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Electrical and Electronic Engineering