Optimization of IGZO/Cu/IGZO multilayers as transparent composite electrode on flexible substrate by room-temperature sputtering and post-deposition anneals

Engineering & Materials Science

• Sputtering 100%
• Multilayers 75%
• Optical properties 72%
• Electric properties 62%
• Electrodes 59%
• Thin films 55%
• Substrates 55%
• Sheet resistance 54%
• Composite materials 45%
• Temperature 31%
• Spectrophotometry 30%
• Magnetron sputtering 26%
• Opacity 25%
• Optoelectronic devices 22%
• Vacuum 17%
• Copper 15%
• Gases 11%

Chemical Compounds

• Sputtering 84%
• Multilayer 69%
• Electrical Property 49%
• Sheet Resistance 47%
• Figure of Merit 44%
• Ambient Reaction Temperature 43%
• Optical Property 42%
• Behavior as Electrode 39%
• Transmittance 39%
• Composite Material 38%
• Magnetron Sputtering 22%
• Optoelectronics 17%
• Spectrophotometry 17%
• Vacuum 15%
• UV/VIS Spectroscopy 12%
• Probe 11%
• Environment 11%
• Gas 10%
• Liquid Film 9%

Physics & Astronomy

• sputtering 61%
• optimization 51%
• electrodes 48%
• composite materials 47%
• room temperature 43%
• electrical properties 42%
• optical properties 38%
• figure of merit 37%
• transmittance 32%
• thin films 30%
• spectrophotometry 23%
• electrode materials 22%
• radio frequencies 16%
• magnetron sputtering 16%
• copper 13%
• vacuum 12%
• probes 11%
• gases 10%
• performance 8%