Optimization of electrothermal material parameters using inverse modeling

Rainer Minixhofer, Stefan Holzer, Clemens Heitzinger, Johannes Fellner, Tibor Grasser, Siegfried Selberherr

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

A method for determining higher order thermal coefficients for electrical and thermal properties of metallic interconnect materials used in semiconductor fabrication is presented. By applying inverse modeling on transient electrothermal three-dimensional finite element simulations the measurements of resistance over time of polysilicon fuse structures can be matched. This method is intended to be applied to the optimization of polysilicon fuses for reliability and speed.

Original languageEnglish (US)
Title of host publicationEuropean Solid-State Device Research Conference
PublisherIEEE Computer Society
Pages363-366
Number of pages4
ISBN (Print)0780379993, 9780780379992
DOIs
StatePublished - 2003
Externally publishedYes
Event33rd European Solid-State Device Research Conference, ESSDERC 2003 - Estoril, Portugal
Duration: Sep 16 2003Sep 18 2003

Other

Other33rd European Solid-State Device Research Conference, ESSDERC 2003
CountryPortugal
CityEstoril
Period9/16/039/18/03

Fingerprint

Electric fuses
Polysilicon
Electric properties
Thermodynamic properties
Semiconductor materials
Fabrication
Hot Temperature

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Safety, Risk, Reliability and Quality

Cite this

Minixhofer, R., Holzer, S., Heitzinger, C., Fellner, J., Grasser, T., & Selberherr, S. (2003). Optimization of electrothermal material parameters using inverse modeling. In European Solid-State Device Research Conference (pp. 363-366). [1256889] IEEE Computer Society. https://doi.org/10.1109/ESSDERC.2003.1256889

Optimization of electrothermal material parameters using inverse modeling. / Minixhofer, Rainer; Holzer, Stefan; Heitzinger, Clemens; Fellner, Johannes; Grasser, Tibor; Selberherr, Siegfried.

European Solid-State Device Research Conference. IEEE Computer Society, 2003. p. 363-366 1256889.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Minixhofer, R, Holzer, S, Heitzinger, C, Fellner, J, Grasser, T & Selberherr, S 2003, Optimization of electrothermal material parameters using inverse modeling. in European Solid-State Device Research Conference., 1256889, IEEE Computer Society, pp. 363-366, 33rd European Solid-State Device Research Conference, ESSDERC 2003, Estoril, Portugal, 9/16/03. https://doi.org/10.1109/ESSDERC.2003.1256889
Minixhofer R, Holzer S, Heitzinger C, Fellner J, Grasser T, Selberherr S. Optimization of electrothermal material parameters using inverse modeling. In European Solid-State Device Research Conference. IEEE Computer Society. 2003. p. 363-366. 1256889 https://doi.org/10.1109/ESSDERC.2003.1256889
Minixhofer, Rainer ; Holzer, Stefan ; Heitzinger, Clemens ; Fellner, Johannes ; Grasser, Tibor ; Selberherr, Siegfried. / Optimization of electrothermal material parameters using inverse modeling. European Solid-State Device Research Conference. IEEE Computer Society, 2003. pp. 363-366
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