Abstract
Carrier recombination lifetime measurements have always been a challenging task when performed on epitaxial layers. This is due to the fact that most techniques determine the lifetime value by measuring the minority carriers' diffusion length. We will present a new method for measuring the lifetime parameter using light excitation on a MOS-capacitor that is biased into heavy inversion. The annihilation of the optically generated carriers under the shield of an existing depletion region simplifies the mathematical analysis. We show that our proposed approach, corroborated by experimental results, is capable of monitoring lifetime variations due to the presence of metallic impurities as low as 1010cm-3.
Original language | English (US) |
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Article number | 6878420 |
Pages (from-to) | 986-988 |
Number of pages | 3 |
Journal | IEEE Electron Device Letters |
Volume | 35 |
Issue number | 10 |
DOIs | |
State | Published - Oct 1 2014 |
Keywords
- Carrier lifetimes
- Epitaxial layers
- Mos capacitors
- Semiconductor defects
- Semiconductor device measurements
- Semiconductor materials
- Silicon
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Electrical and Electronic Engineering