Abstract
This paper studies the operational logic in an inter-bay automated material handling system (AMHS) in semiconductor wafer fabrication. This system consists of stockers located in a two-floor layout. Automated moving devices transfer lots between stockers within the same floor (intra-floor lot transfer) or between different floors (inter-floor lot transfer). Intra-floor lot-transferring transports use a two-rail one-directional system, whereas inter-floor lot-transferring transports use lifters. The decision problem consists of selecting rails and lifters that minimize average lot-delivery time. Several operation rules to deliver lots from source stocker to destination stocker are proposed and their performance is evaluated by discrete event simulation.
Original language | English (US) |
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Title of host publication | Winter Simulation Conference Proceedings |
Editors | E. Yucesan, C.H. Chen, J.L. Snowdon, J.M. Charnes |
Pages | 1377-1382 |
Number of pages | 6 |
Volume | 2 |
State | Published - 2002 |
Event | Proceedings of the 2002 Winter Simulation Conference - San Diego, CA, United States Duration: Dec 8 2002 → Dec 11 2002 |
Other
Other | Proceedings of the 2002 Winter Simulation Conference |
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Country/Territory | United States |
City | San Diego, CA |
Period | 12/8/02 → 12/11/02 |
ASJC Scopus subject areas
- Chemical Health and Safety
- Software
- Safety, Risk, Reliability and Quality
- Applied Mathematics
- Modeling and Simulation