Operational modeling and simulation of an inter-bay AMHS in semiconductor wafer fabrication

Jesus Jimenez, Bosun Kim, John Fowler, Gerald Mackulak, You In Choung, Dong Jin Kim

Research output: Chapter in Book/Report/Conference proceedingConference contribution

16 Scopus citations

Abstract

This paper studies the operational logic in an inter-bay automated material handling system (AMHS) in semiconductor wafer fabrication. This system consists of stockers located in a two-floor layout. Automated moving devices transfer lots between stockers within the same floor (intra-floor lot transfer) or between different floors (inter-floor lot transfer). Intra-floor lot-transferring transports use a two-rail one-directional system, whereas inter-floor lot-transferring transports use lifters. The decision problem consists of selecting rails and lifters that minimize average lot-delivery time. Several operation rules to deliver lots from source stocker to destination stocker are proposed and their performance is evaluated by discrete event simulation.

Original languageEnglish (US)
Title of host publicationWinter Simulation Conference Proceedings
EditorsE. Yucesan, C.H. Chen, J.L. Snowdon, J.M. Charnes
Pages1377-1382
Number of pages6
Volume2
StatePublished - 2002
EventProceedings of the 2002 Winter Simulation Conference - San Diego, CA, United States
Duration: Dec 8 2002Dec 11 2002

Other

OtherProceedings of the 2002 Winter Simulation Conference
Country/TerritoryUnited States
CitySan Diego, CA
Period12/8/0212/11/02

ASJC Scopus subject areas

  • Chemical Health and Safety
  • Software
  • Safety, Risk, Reliability and Quality
  • Applied Mathematics
  • Modeling and Simulation

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