Operational modeling & simulation in semiconductor manufacturing

John Fowler, Michael C. Fu, Lee W. Schruben, Steven Brown, Frank Chance, Sean Cunningham, Courtland Hilton, Mani Janakiram, Rick Stafford, James Hutchby

Research output: Chapter in Book/Report/Conference proceedingConference contribution

9 Citations (Scopus)

Abstract

We present a panel session on the role of simulation in improving semiconductor fab operations. The participants include three principal investigators (PIs) from the recently awarded three-year, $1.2 million contracts sponsored jointly by the National Science Foundation (NSF) and the Semiconductor Research Corporation (SRC) on Operational Methods in Semiconductor Manufacturing; the Factory Sciences Program Director from SRC; and industry representatives from the semiconductor manufacturers and from discrete-event simulation vendors. Included here in these proceedings are initial position statements from the various participants, which formed the basis for the panel discussions. For the industry participants, the statements may include, but were not limited to, specific important problems related to the role of simulation in operations in their respective companies, noting any significant technical, managerial, market, or other barriers. The position statements of the academic PIs describe the role that simulation is expected to play in their ongoing research in semiconductor manufacturing and/or their views on the key to successful application of simulation in the industry.

Original languageEnglish (US)
Title of host publicationWinter Simulation Conference Proceedings
PublisherIEEE
Pages1035-1040
Number of pages6
Volume2
StatePublished - 1998
EventProceedings of the 1998 Winter Simulation Conference, WSC. Part 1 (of 2) - Washington, DC, USA
Duration: Dec 13 1998Dec 16 1998

Other

OtherProceedings of the 1998 Winter Simulation Conference, WSC. Part 1 (of 2)
CityWashington, DC, USA
Period12/13/9812/16/98

Fingerprint

Semiconductor Manufacturing
Semiconductors
Semiconductor materials
Industry
Modeling
Simulation
Discrete Event Simulation
Discrete event simulation
Industrial plants

ASJC Scopus subject areas

  • Chemical Health and Safety
  • Software
  • Safety, Risk, Reliability and Quality
  • Applied Mathematics
  • Modeling and Simulation

Cite this

Fowler, J., Fu, M. C., Schruben, L. W., Brown, S., Chance, F., Cunningham, S., ... Hutchby, J. (1998). Operational modeling & simulation in semiconductor manufacturing. In Winter Simulation Conference Proceedings (Vol. 2, pp. 1035-1040). IEEE.

Operational modeling & simulation in semiconductor manufacturing. / Fowler, John; Fu, Michael C.; Schruben, Lee W.; Brown, Steven; Chance, Frank; Cunningham, Sean; Hilton, Courtland; Janakiram, Mani; Stafford, Rick; Hutchby, James.

Winter Simulation Conference Proceedings. Vol. 2 IEEE, 1998. p. 1035-1040.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Fowler, J, Fu, MC, Schruben, LW, Brown, S, Chance, F, Cunningham, S, Hilton, C, Janakiram, M, Stafford, R & Hutchby, J 1998, Operational modeling & simulation in semiconductor manufacturing. in Winter Simulation Conference Proceedings. vol. 2, IEEE, pp. 1035-1040, Proceedings of the 1998 Winter Simulation Conference, WSC. Part 1 (of 2), Washington, DC, USA, 12/13/98.
Fowler J, Fu MC, Schruben LW, Brown S, Chance F, Cunningham S et al. Operational modeling & simulation in semiconductor manufacturing. In Winter Simulation Conference Proceedings. Vol. 2. IEEE. 1998. p. 1035-1040
Fowler, John ; Fu, Michael C. ; Schruben, Lee W. ; Brown, Steven ; Chance, Frank ; Cunningham, Sean ; Hilton, Courtland ; Janakiram, Mani ; Stafford, Rick ; Hutchby, James. / Operational modeling & simulation in semiconductor manufacturing. Winter Simulation Conference Proceedings. Vol. 2 IEEE, 1998. pp. 1035-1040
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