On-Wafer Graphene Devices for THz Applications Using a High-Yield Fabrication Process

Panagiotis C. Theofanopoulos, Georgios Trichopoulos

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We characterize a novel fabrication procedure for the implementation of large arrays of subwavelength graphene devices. With the proposed process, we can now integrate graphene layers on large substrate areas (> 4 cm) and implement thousands of devices with high-yield (> 90 %). Examples of such systems include broadband THz phased arrays and metasurfaces that can be used in THz imaging and sensing. Current nano-fabrication processes hinder the proliferation of large arrays due to the fragile nature of graphene. Conversely, we use titanium sacrificial layers to protect the delicate graphene throughout the fabrication process. Thus, we minimize graphene delamination and enable multiple devices on large-area substrates with high-yield. In addition, we present a series of on-wafer measurement results in the 220-330 GHz band, verifying the robustness of our fabrication process.

Original languageEnglish (US)
Title of host publication2019 IEEE MTT-S International Microwave Symposium, IMS 2019
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages1107-1110
Number of pages4
ISBN (Electronic)9781728113098
StatePublished - Jun 1 2019
Event2019 IEEE MTT-S International Microwave Symposium, IMS 2019 - Boston, United States
Duration: Jun 2 2019Jun 7 2019

Publication series

NameIEEE MTT-S International Microwave Symposium Digest
Volume2019-June
ISSN (Print)0149-645X

Conference

Conference2019 IEEE MTT-S International Microwave Symposium, IMS 2019
CountryUnited States
CityBoston
Period6/2/196/7/19

Fingerprint

Graphene
graphene
wafers
Fabrication
fabrication
Substrates
Nanotechnology
Delamination
nanofabrication
phased arrays
Titanium
Imaging techniques
titanium
Graphene devices
broadband

Keywords

  • characterization
  • fabrication
  • Graphene
  • on-wafer
  • terahertz

ASJC Scopus subject areas

  • Radiation
  • Condensed Matter Physics
  • Electrical and Electronic Engineering

Cite this

Theofanopoulos, P. C., & Trichopoulos, G. (2019). On-Wafer Graphene Devices for THz Applications Using a High-Yield Fabrication Process. In 2019 IEEE MTT-S International Microwave Symposium, IMS 2019 (pp. 1107-1110). [8701093] (IEEE MTT-S International Microwave Symposium Digest; Vol. 2019-June). Institute of Electrical and Electronics Engineers Inc..

On-Wafer Graphene Devices for THz Applications Using a High-Yield Fabrication Process. / Theofanopoulos, Panagiotis C.; Trichopoulos, Georgios.

2019 IEEE MTT-S International Microwave Symposium, IMS 2019. Institute of Electrical and Electronics Engineers Inc., 2019. p. 1107-1110 8701093 (IEEE MTT-S International Microwave Symposium Digest; Vol. 2019-June).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Theofanopoulos, PC & Trichopoulos, G 2019, On-Wafer Graphene Devices for THz Applications Using a High-Yield Fabrication Process. in 2019 IEEE MTT-S International Microwave Symposium, IMS 2019., 8701093, IEEE MTT-S International Microwave Symposium Digest, vol. 2019-June, Institute of Electrical and Electronics Engineers Inc., pp. 1107-1110, 2019 IEEE MTT-S International Microwave Symposium, IMS 2019, Boston, United States, 6/2/19.
Theofanopoulos PC, Trichopoulos G. On-Wafer Graphene Devices for THz Applications Using a High-Yield Fabrication Process. In 2019 IEEE MTT-S International Microwave Symposium, IMS 2019. Institute of Electrical and Electronics Engineers Inc. 2019. p. 1107-1110. 8701093. (IEEE MTT-S International Microwave Symposium Digest).
Theofanopoulos, Panagiotis C. ; Trichopoulos, Georgios. / On-Wafer Graphene Devices for THz Applications Using a High-Yield Fabrication Process. 2019 IEEE MTT-S International Microwave Symposium, IMS 2019. Institute of Electrical and Electronics Engineers Inc., 2019. pp. 1107-1110 (IEEE MTT-S International Microwave Symposium Digest).
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