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On the structure of the recessed-channel MOSFET for sub-100 nm Si CMOS
Meng Tao
, Kody Varahramyan
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Article
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peer-review
2
Scopus citations
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Physics & Astronomy
CMOS
100%
field effect transistors
87%
profiles
10%
simulation
7%
Chemical Compounds
Simulation
70%
Engineering & Materials Science
Semiconductor doping
56%