ON THE PERFORMANCE OF A FIELD EMISSION GUN TEM/STEM.

R. W. Carpenter, J. Bentley

Research output: Contribution to journalConference articlepeer-review

4 Scopus citations

Abstract

First experimental results on a Philips EM 400 TEM/STEM fitted with a field-emission electron gun and objective ″twin lens″ are given here. Operation of the FEG is reliable up to maximum design voltage (120 kV). Highest resolution achieved in TEM was 1. 9 A fringe. A wide variety of diffraction modes were demonstrated, ranging from CBDP from a small area ( similar 10 A dia) in STEM mode to SAD with angular resolution of 8 mu rad in TEM mode. The EDS sensitivity is very high. STEM imaging performance to the highest magnifications examined (200 kx) is good. Work is in progress to evaluate the limits of STEM performance.

Original languageEnglish (US)
Pages (from-to)153-160
Number of pages8
JournalScanning Electron Microscopy
Issue numberpt 1
StatePublished - Jan 1 1979
Externally publishedYes
EventPap presented at a Meet - Washington, DC, USA
Duration: Apr 16 1979Apr 20 1979

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Biophysics

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