The use of a sector magnet spectrometer as a low-energy-loss electron detector for surface imaging in the scanning transmission electron microscope (STEM) is described. It is shown that analysis of image contrast as a function of electron energy loss allows surface step heights down to about 1 nm to be estimated.
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Atomic and Molecular Physics, and Optics