On the measurement of surface step heights by low-loss imaging in stem

M. M.J. Treacy; J. Bellessa

doi:10.1016/0304-3991(83)90234-6

On the measurement of surface step heights by low-loss imaging in stem

M. M.J. Treacy, J. Bellessa

Research output: Contribution to journal › Article › peer-review

3 Scopus citations

Abstract

The use of a sector magnet spectrometer as a low-energy-loss electron detector for surface imaging in the scanning transmission electron microscope (STEM) is described. It is shown that analysis of image contrast as a function of electron energy loss allows surface step heights down to about 1 nm to be estimated.

Original language	English (US)
Pages (from-to)	173-178
Number of pages	6
Journal	Ultramicroscopy
Volume	11
Issue number	2-3
DOIs	https://doi.org/10.1016/0304-3991(83)90234-6
State	Published - 1983
Externally published	Yes

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Atomic and Molecular Physics, and Optics
Instrumentation

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10.1016/0304-3991(83)90234-6

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title = "On the measurement of surface step heights by low-loss imaging in stem",

abstract = "The use of a sector magnet spectrometer as a low-energy-loss electron detector for surface imaging in the scanning transmission electron microscope (STEM) is described. It is shown that analysis of image contrast as a function of electron energy loss allows surface step heights down to about 1 nm to be estimated.",

author = "Treacy, {M. M.J.} and J. Bellessa",

year = "1983",

doi = "10.1016/0304-3991(83)90234-6",

language = "English (US)",

volume = "11",

pages = "173--178",

journal = "Ultramicroscopy",

issn = "0304-3991",

publisher = "Elsevier",

number = "2-3",

}

TY - JOUR

T1 - On the measurement of surface step heights by low-loss imaging in stem

AU - Treacy, M. M.J.

AU - Bellessa, J.

PY - 1983

Y1 - 1983

N2 - The use of a sector magnet spectrometer as a low-energy-loss electron detector for surface imaging in the scanning transmission electron microscope (STEM) is described. It is shown that analysis of image contrast as a function of electron energy loss allows surface step heights down to about 1 nm to be estimated.

AB - The use of a sector magnet spectrometer as a low-energy-loss electron detector for surface imaging in the scanning transmission electron microscope (STEM) is described. It is shown that analysis of image contrast as a function of electron energy loss allows surface step heights down to about 1 nm to be estimated.

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U2 - 10.1016/0304-3991(83)90234-6

DO - 10.1016/0304-3991(83)90234-6

M3 - Article

AN - SCOPUS:0020898851

SN - 0304-3991

VL - 11

SP - 173

EP - 178

JO - Ultramicroscopy

JF - Ultramicroscopy

IS - 2-3

ER -

On the measurement of surface step heights by low-loss imaging in stem

Abstract

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