On the measurement of surface step heights by low-loss imaging in stem

M. M.J. Treacy, J. Bellessa

Research output: Contribution to journalArticle

3 Scopus citations

Abstract

The use of a sector magnet spectrometer as a low-energy-loss electron detector for surface imaging in the scanning transmission electron microscope (STEM) is described. It is shown that analysis of image contrast as a function of electron energy loss allows surface step heights down to about 1 nm to be estimated.

Original languageEnglish (US)
Pages (from-to)173-178
Number of pages6
JournalUltramicroscopy
Volume11
Issue number2-3
DOIs
StatePublished - 1983
Externally publishedYes

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Instrumentation

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