On the measurement of surface step heights by low-loss imaging in stem

Michael Treacy, J. Bellessa

Research output: Contribution to journalArticle

3 Citations (Scopus)

Abstract

The use of a sector magnet spectrometer as a low-energy-loss electron detector for surface imaging in the scanning transmission electron microscope (STEM) is described. It is shown that analysis of image contrast as a function of electron energy loss allows surface step heights down to about 1 nm to be estimated.

Original languageEnglish (US)
Pages (from-to)173-178
Number of pages6
JournalUltramicroscopy
Volume11
Issue number2-3
DOIs
StatePublished - 1983
Externally publishedYes

Fingerprint

stems
Energy dissipation
energy dissipation
electron counters
Imaging techniques
Electrons
image contrast
Magnets
Spectrometers
Electron microscopes
magnets
sectors
electron microscopes
spectrometers
electron energy
Detectors
Scanning
scanning

ASJC Scopus subject areas

  • Materials Science(all)
  • Instrumentation

Cite this

On the measurement of surface step heights by low-loss imaging in stem. / Treacy, Michael; Bellessa, J.

In: Ultramicroscopy, Vol. 11, No. 2-3, 1983, p. 173-178.

Research output: Contribution to journalArticle

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