On the importance of fifth-order spherical aberration for a fully corrected electron microscope

L. Y. Chang, A. I. Kirkland, J. M. Titchmarsh

Research output: Contribution to journalArticle

45 Scopus citations

Abstract

Next generation aberration correctors will not only eliminate the third-order spherical aberration, but also improve the information limit by correction of chromatic aberration. As a result of these improvements, higher order aberrations, which have largely been neglected in image analysis, will become important. In this paper, we concern ourselves with situations where sub-Å resolution can be achieved, and where the third-order spherical aberration is corrected and the fifth-order spherical aberration is measurable. We derive formulae to explore the maximum value of the fifth-order spherical aberration for directly interpretable imaging and discuss the optimum imaging conditions and their applicable range.

Original languageEnglish (US)
Pages (from-to)301-306
Number of pages6
JournalUltramicroscopy
Volume106
Issue number4-5
DOIs
StatePublished - Mar 1 2006

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Keywords

  • C and C-corrected microscope
  • Phase contrast theory

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Instrumentation

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