Abstract
The concept of on-chip switching for parametric testing of semiconductor processing is introduced. The feasibility of this approach is demonstrated for contact chain and diode-connected MOSFETs.
Original language | English (US) |
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Pages (from-to) | 422-423 |
Number of pages | 2 |
Journal | Electronics Letters |
Volume | 21 |
Issue number | 10 |
DOIs | |
State | Published - May 9 1985 |
Keywords
- Integrated circuits
- Semiconductor devices and materials
- Semiconductor switches
ASJC Scopus subject areas
- Electrical and Electronic Engineering