Abstract
We present real time images of the evolution of the structure of the Si (1 1 1) surface during the deposition of cobalt at elevated temperatures, acquired using low-energy electron microscopy. The system follows a sequence of coexisting ordered and disordered phases, consistent with two-dimensional eutectic behavior. Reversible temperature driven transitions are observed between the ordered Si (1 1 1)(7 X 7) reconstructed phase and a disordered lattice gas of Co-containing ring-clusters (RC), indicating a local equilibrium between these structures. Only irreversible temperature driven transitions from an ordered (√7 x √7)-RC phase to the disordered phase are observed. The nucleation and growth of stable islands, mostly CoSi2, depletes the Co-rich (√7 x √7) structure of Co, resulting in the formation and growth of adjacent regions of the Co-poor disordered '(1 x 1)'-RC phase.
Original language | English (US) |
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Pages (from-to) | 13-20 |
Number of pages | 8 |
Journal | Micron |
Volume | 30 |
Issue number | 1 |
DOIs | |
State | Published - Feb 1999 |
Keywords
- Electron microscopy
- Low-energy electron microscopy
- Silicides
- Surface phase separation
- Surface phase transitions
- Surfaces
ASJC Scopus subject areas
- Structural Biology
- Materials Science(all)
- Physics and Astronomy(all)
- Cell Biology