Abstract
The core structure of threading dislocations in Mg-doped Al0.03Ga0.97N thin films was examined using transmission electron microscopy. It was demonstrated that edge and mixed dislocations in Mg-doped Al0.03Ga0.97N films can have hollow cores with diameters in the range of 1-5 nm. A model was presented in which hollow core formation is initiated by the segregation and subsequent precipitation of Mg at these dislocation cores.
Original language | English (US) |
---|---|
Pages (from-to) | 4541-4543 |
Number of pages | 3 |
Journal | Applied Physics Letters |
Volume | 81 |
Issue number | 24 |
DOIs | |
State | Published - Dec 9 2002 |
ASJC Scopus subject areas
- Physics and Astronomy (miscellaneous)