Novel uses of TiO2 in crystalline silicon solar cells

Bryce S. Richards, Jeffrey E. Cotter, Christiana B. Honsberg, Stuart R. Wenham

Research output: Chapter in Book/Report/Conference proceedingConference contribution

36 Scopus citations

Abstract

Novel applications for titanium dioxide (TiO2) thin films have the potential to reduce production costs of silicon (Si) solar cells, especially for structures like the buried-contact solar cell. This paper demonstrates several new uses for TiO2 films. Firstly, it is demonstrated that the TiO2 film does not contaminate the silicon wafer or furnace after lengthy high-temperature processing. Secondly, a thin silicon dioxide passivation layer can be grown at the TiO2/Si interface by performing a brief oxidation after the deposition of the TiO2. With this method, very low emitter dark saturation currents have been achieved on lightly-diffused high-resistivity float zone wafers. Thirdly, TiO2 films doped with 1% phosphorus were investigated as an emitter dopant source. Initial results have shown that light diffusions are possible. Finally, the applicability of TiO2 as a phosphorus diffusion barrier was investigated.

Original languageEnglish (US)
Title of host publicationConference Record of the 28th IEEE Photovoltaic Specialists Conference - 2000
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages375-378
Number of pages4
ISBN (Electronic)0780357728
DOIs
StatePublished - Jan 1 2000
Externally publishedYes
Event28th IEEE Photovoltaic Specialists Conference, PVSC 2000 - Anchorage, United States
Duration: Sep 15 2000Sep 22 2000

Publication series

NameConference Record of the IEEE Photovoltaic Specialists Conference
Volume2000-January
ISSN (Print)0160-8371

Other

Other28th IEEE Photovoltaic Specialists Conference, PVSC 2000
CountryUnited States
CityAnchorage
Period9/15/009/22/00

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Industrial and Manufacturing Engineering
  • Electrical and Electronic Engineering

Fingerprint Dive into the research topics of 'Novel uses of TiO<sub>2</sub> in crystalline silicon solar cells'. Together they form a unique fingerprint.

  • Cite this

    Richards, B. S., Cotter, J. E., Honsberg, C. B., & Wenham, S. R. (2000). Novel uses of TiO2 in crystalline silicon solar cells. In Conference Record of the 28th IEEE Photovoltaic Specialists Conference - 2000 (pp. 375-378). [915844] (Conference Record of the IEEE Photovoltaic Specialists Conference; Vol. 2000-January). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/PVSC.2000.915844