Novel synthetic routes to carbon-nitrogen thin films

John Kouvetakis, Anil Bandari, Michael Todd, Barry Wilkens, Nigel Cave

Research output: Contribution to journalArticle

206 Citations (Scopus)

Abstract

New unimolecular carbon-nitride precursors such as C3N3F2N(SiMe3)2 and C3N3Cl2N(SiMe3)2 were synthesized and used to deposit thin films of composition C3N4-C3.2N4, the highest nitrogen content observed in C-N solids. The films were formed by the thermal decomposition of the precursors via elimination of SiMe3F and SiMe3Cl at 400-500°C. Film thicknesses between 1200 and 4000 Å were deposited on (100) Si, graphite, beryllium, and SiO2, and were extensively characterized for composition and chemical purity using RBS, energy-dispersive X-ray analysis, and SIMS. The material was amorphous as indicated by X-ray diffraction. IR, EELS, and 13C NMR reveal substantial sp2 hybridization in both the carbon and the nitrogen. This material should be an excellent precursor for the high-pressure synthesis of C3N4, the highly sought structural and compositional analog of Si3N4.

Original languageEnglish (US)
Pages (from-to)811-814
Number of pages4
JournalChemistry of Materials
Volume6
Issue number6
StatePublished - 1994

Fingerprint

Nitrogen
Carbon
Beryllium
Thin films
Graphite
Carbon nitride
Energy dispersive X ray analysis
Electron energy loss spectroscopy
Secondary ion mass spectrometry
Chemical analysis
Film thickness
Pyrolysis
Deposits
Nuclear magnetic resonance
X ray diffraction
cyanogen
silicon nitride

ASJC Scopus subject areas

  • Materials Chemistry
  • Materials Science(all)

Cite this

Kouvetakis, J., Bandari, A., Todd, M., Wilkens, B., & Cave, N. (1994). Novel synthetic routes to carbon-nitrogen thin films. Chemistry of Materials, 6(6), 811-814.

Novel synthetic routes to carbon-nitrogen thin films. / Kouvetakis, John; Bandari, Anil; Todd, Michael; Wilkens, Barry; Cave, Nigel.

In: Chemistry of Materials, Vol. 6, No. 6, 1994, p. 811-814.

Research output: Contribution to journalArticle

Kouvetakis, J, Bandari, A, Todd, M, Wilkens, B & Cave, N 1994, 'Novel synthetic routes to carbon-nitrogen thin films', Chemistry of Materials, vol. 6, no. 6, pp. 811-814.
Kouvetakis J, Bandari A, Todd M, Wilkens B, Cave N. Novel synthetic routes to carbon-nitrogen thin films. Chemistry of Materials. 1994;6(6):811-814.
Kouvetakis, John ; Bandari, Anil ; Todd, Michael ; Wilkens, Barry ; Cave, Nigel. / Novel synthetic routes to carbon-nitrogen thin films. In: Chemistry of Materials. 1994 ; Vol. 6, No. 6. pp. 811-814.
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