@inproceedings{1856aed8b23c4795bd4c5ed7d16c1b65,
title = "Novel in-plane polarized PZT film based ultrasonic micro-acoustic device",
abstract = "This paper presents the design, fabrication and testing results of a novel in-plane polarized PZT film based micro-acoustic device for ultrasonic applications. The proposed micro-acoustic device with Pt/PZT/TiO 2/SiO2 structure can be used for both microphone and microspeaker due to the piezoelectric effect and converse piezoelectric effect of PZT film. The PZT film is polarized along in-plane direction by top square ring shaped interdigitated (IDT) electrodes and works in d33 mode. The fabricated d33-mode micro-acoustic devices have good ultrasonic receiving and transmitting performance, and the resonance frequency is around 44 kHz.",
keywords = "In-plane polarization, Interdigitated (IDT) electrodes, Lead zirconate titanate (PZT), Ultrasonic micro-acoustic device",
author = "Zhu, {Yi Ping} and Ren, {Tian Ling} and Chao Wang and Wang, {Zhe Yao} and Liu, {Li Tian} and Li, {Zhi Jian}",
year = "2007",
month = dec,
day = "1",
doi = "10.1109/SENSOR.2007.4300374",
language = "English (US)",
isbn = "1424408423",
series = "TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems",
pages = "1291--1294",
booktitle = "TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems",
note = "4th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS '07 ; Conference date: 10-06-2007 Through 14-06-2007",
}