Novel in-plane polarized PZT film based ultrasonic micro-acoustic device

Yi Ping Zhu, Tian Ling Ren, Chao Wang, Zhe Yao Wang, Li Tian Liu, Zhi Jian Li

Research output: Chapter in Book/Report/Conference proceedingConference contribution

5 Scopus citations

Abstract

This paper presents the design, fabrication and testing results of a novel in-plane polarized PZT film based micro-acoustic device for ultrasonic applications. The proposed micro-acoustic device with Pt/PZT/TiO 2/SiO2 structure can be used for both microphone and microspeaker due to the piezoelectric effect and converse piezoelectric effect of PZT film. The PZT film is polarized along in-plane direction by top square ring shaped interdigitated (IDT) electrodes and works in d33 mode. The fabricated d33-mode micro-acoustic devices have good ultrasonic receiving and transmitting performance, and the resonance frequency is around 44 kHz.

Original languageEnglish (US)
Title of host publicationTRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems
Pages1291-1294
Number of pages4
DOIs
StatePublished - Dec 1 2007
Externally publishedYes
Event4th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS '07 - Lyon, France
Duration: Jun 10 2007Jun 14 2007

Publication series

NameTRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems

Other

Other4th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS '07
CountryFrance
CityLyon
Period6/10/076/14/07

Keywords

  • In-plane polarization
  • Interdigitated (IDT) electrodes
  • Lead zirconate titanate (PZT)
  • Ultrasonic micro-acoustic device

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Electrical and Electronic Engineering

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  • Cite this

    Zhu, Y. P., Ren, T. L., Wang, C., Wang, Z. Y., Liu, L. T., & Li, Z. J. (2007). Novel in-plane polarized PZT film based ultrasonic micro-acoustic device. In TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems (pp. 1291-1294). [4300374] (TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems). https://doi.org/10.1109/SENSOR.2007.4300374