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NOVEL CHEMICAL ROUTE TO SiGeC MATERIALS
John Kouvetakis
(Inventor)
Arizona State University
Research output
:
Patent
Overview
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Physics & Astronomy
zincblende
100%
thermal decomposition
88%
ultrahigh vacuum
80%
carbides
78%
solid solutions
65%
diamonds
63%
vapor deposition
61%
vibration
52%
transmission electron microscopy
52%
thin films
41%