Abstract
This paper describes a Noninvasive Acoustic-Wave Microfluidic Driver built on a PZT sheet. The driver is based on the acoustic streaming effect and the self-focusing nature of the Fresnel Annular Sector Actuator (FASA). An array of FASAs is produced on a PZT sheet, and set adjacent to a silicon wafer to produce a fast liquid motion (up to 123 mm/s) in a 0.8 mm wide, 9 mm long and 0.2 mm deep channel in the silicon. The self-focused waves from the FASA array propagate through the 200 μm thick silicon, and act on the water contained in the channel. Three kinds of FASA arrays have been fabricated along with their associated channel structures in silicon, and shown to transport the liquids effectively. The experiment results obtained on the fabricated devices confirm the theory and simulation.
| Original language | English (US) |
|---|---|
| Title of host publication | Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS) |
| Pages | 125-128 |
| Number of pages | 4 |
| State | Published - 2002 |
| Externally published | Yes |
| Event | 15th IEEE International Conference on Micro Electro Mechanical Systems MEMS 2002 - Las Vegas, NV, United States Duration: Jan 20 2002 → Jan 24 2002 |
Other
| Other | 15th IEEE International Conference on Micro Electro Mechanical Systems MEMS 2002 |
|---|---|
| Country | United States |
| City | Las Vegas, NV |
| Period | 1/20/02 → 1/24/02 |
ASJC Scopus subject areas
- Control and Systems Engineering
- Electrical and Electronic Engineering
- Mechanical Engineering