Abstract
This paper describes a Noninvasive Acoustic-Wave Microfluidic Driver built on a PZT sheet. The driver is based on the acoustic streaming effect and the self-focusing nature of the Fresnel Annular Sector Actuator (FASA). An array of FASAs is produced on a PZT sheet, and set adjacent to a silicon wafer to produce a fast liquid motion (up to 123 mm/s) in a 0.8 mm wide, 9 mm long and 0.2 mm deep channel in the silicon. The self-focused waves from the FASA array propagate through the 200 μm thick silicon, and act on the water contained in the channel. Three kinds of FASA arrays have been fabricated along with their associated channel structures in silicon, and shown to transport the liquids effectively. The experiment results obtained on the fabricated devices confirm the theory and simulation.
| Original language | English (US) |
|---|---|
| Title of host publication | Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS) |
| Pages | 125-128 |
| Number of pages | 4 |
| State | Published - 2002 |
| Externally published | Yes |
| Event | 15th IEEE International Conference on Micro Electro Mechanical Systems MEMS 2002 - Las Vegas, NV, United States Duration: Jan 20 2002 → Jan 24 2002 |
Other
| Other | 15th IEEE International Conference on Micro Electro Mechanical Systems MEMS 2002 |
|---|---|
| Country | United States |
| City | Las Vegas, NV |
| Period | 1/20/02 → 1/24/02 |
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ASJC Scopus subject areas
- Control and Systems Engineering
- Electrical and Electronic Engineering
- Mechanical Engineering
Cite this
Noninvasive acoustic-wave microfluidic driver. / Yu, Hongyu; Kim, Eun Sok.
Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS). 2002. p. 125-128.Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
}
TY - GEN
T1 - Noninvasive acoustic-wave microfluidic driver
AU - Yu, Hongyu
AU - Kim, Eun Sok
PY - 2002
Y1 - 2002
N2 - This paper describes a Noninvasive Acoustic-Wave Microfluidic Driver built on a PZT sheet. The driver is based on the acoustic streaming effect and the self-focusing nature of the Fresnel Annular Sector Actuator (FASA). An array of FASAs is produced on a PZT sheet, and set adjacent to a silicon wafer to produce a fast liquid motion (up to 123 mm/s) in a 0.8 mm wide, 9 mm long and 0.2 mm deep channel in the silicon. The self-focused waves from the FASA array propagate through the 200 μm thick silicon, and act on the water contained in the channel. Three kinds of FASA arrays have been fabricated along with their associated channel structures in silicon, and shown to transport the liquids effectively. The experiment results obtained on the fabricated devices confirm the theory and simulation.
AB - This paper describes a Noninvasive Acoustic-Wave Microfluidic Driver built on a PZT sheet. The driver is based on the acoustic streaming effect and the self-focusing nature of the Fresnel Annular Sector Actuator (FASA). An array of FASAs is produced on a PZT sheet, and set adjacent to a silicon wafer to produce a fast liquid motion (up to 123 mm/s) in a 0.8 mm wide, 9 mm long and 0.2 mm deep channel in the silicon. The self-focused waves from the FASA array propagate through the 200 μm thick silicon, and act on the water contained in the channel. Three kinds of FASA arrays have been fabricated along with their associated channel structures in silicon, and shown to transport the liquids effectively. The experiment results obtained on the fabricated devices confirm the theory and simulation.
UR - http://www.scopus.com/inward/record.url?scp=0036197723&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=0036197723&partnerID=8YFLogxK
M3 - Conference contribution
AN - SCOPUS:0036197723
SP - 125
EP - 128
BT - Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)
ER -