@inproceedings{3339ab8f83cc40b089990ad10fc53756,
title = "Non-contact THz probes for on-chip device and IC characterization",
abstract = "We propose a contactless characterization approach for evaluating semiconductor devices and integrated circuits that operate in the THz regime (0.1-3 THz). The non-contact probe consists of on-chip receiving and transmitting THz antennas in a co-planar waveguide environment. Commercially available frequency extension modules with horn antennas are used in conjunction with microwave vector network analyzers to excite the proposed non-contact probe. A hemispherical lens couples the signals into device under test using the on-chip antennas. We discuss the calibration process and present the numerical evaluation of two non-contact probe schemes.",
keywords = "THz antennas, THz device characterization, mmW, sub-mmW",
author = "Trichopoulos, {Georgios C.} and Kagan Topalli and Kubilay Sertel",
year = "2012",
month = jan,
day = "1",
doi = "10.1109/NAECON.2012.6531023",
language = "English (US)",
isbn = "9781467327916",
series = "National Aerospace and Electronics Conference, Proceedings of the IEEE",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "34--35",
booktitle = "Proceedings of the 2012 IEEE National Aerospace and Electronics Conference, NAECON 2012",
note = "2012 IEEE National Aerospace and Electronics Conference, NAECON 2012 ; Conference date: 25-07-2012 Through 27-07-2012",
}