Non-contact THz probes for on-chip device and IC characterization

Georgios C. Trichopoulos, Kagan Topalli, Kubilay Sertel

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We propose a contactless characterization approach for evaluating semiconductor devices and integrated circuits that operate in the THz regime (0.1-3 THz). The non-contact probe consists of on-chip receiving and transmitting THz antennas in a co-planar waveguide environment. Commercially available frequency extension modules with horn antennas are used in conjunction with microwave vector network analyzers to excite the proposed non-contact probe. A hemispherical lens couples the signals into device under test using the on-chip antennas. We discuss the calibration process and present the numerical evaluation of two non-contact probe schemes.

Original languageEnglish (US)
Title of host publicationProceedings of the 2012 IEEE National Aerospace and Electronics Conference, NAECON 2012
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages34-35
Number of pages2
ISBN (Print)9781467327916
DOIs
StatePublished - Jan 1 2012
Externally publishedYes
Event2012 IEEE National Aerospace and Electronics Conference, NAECON 2012 - Dayton, OH, United States
Duration: Jul 25 2012Jul 27 2012

Publication series

NameNational Aerospace and Electronics Conference, Proceedings of the IEEE

Other

Other2012 IEEE National Aerospace and Electronics Conference, NAECON 2012
CountryUnited States
CityDayton, OH
Period7/25/127/27/12

Keywords

  • THz antennas
  • THz device characterization
  • mmW
  • sub-mmW

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Aerospace Engineering

Fingerprint Dive into the research topics of 'Non-contact THz probes for on-chip device and IC characterization'. Together they form a unique fingerprint.

  • Cite this

    Trichopoulos, G. C., Topalli, K., & Sertel, K. (2012). Non-contact THz probes for on-chip device and IC characterization. In Proceedings of the 2012 IEEE National Aerospace and Electronics Conference, NAECON 2012 (pp. 34-35). [6531023] (National Aerospace and Electronics Conference, Proceedings of the IEEE). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/NAECON.2012.6531023