Noise analysis and characterization of a sigma-delta capacitive silicon microaccelerometer

H. Kulah, Junseok Chae, K. Najafi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

16 Scopus citations

Abstract

This paper reports a high-sensitivity low-noise capacitive accelerometer system with one micro-g/√Hz resolution. The system operates as a 2nd-order electromechanical Σ-Δ modulator together with the interface electronics. A detailed noise analysis of electromechanical Σ-Δ capacitive accelerometers with a final goal of achieving sub-μg resolution is also presented. The circuit has more than 120 dB dynamic range and can resolve better than 10 aF. The complete module operates from a single 5V supply and has a measured sensitivity of 960 mV/g with a noise floor of 1.08 μg/√Hz in open-loop. This system can resolve better than 10 μg/√Hz in closed-loop.

Original languageEnglish (US)
Title of host publicationTRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages95-98
Number of pages4
ISBN (Electronic)0780377311, 9780780377318
DOIs
StatePublished - Jan 1 2003
Externally publishedYes
Event12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers - Boston, United States
Duration: Jun 8 2003Jun 12 2003

Publication series

NameTRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers
Volume1

Other

Other12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers
CountryUnited States
CityBoston
Period6/8/036/12/03

Keywords

  • 1f noise
  • Accelerometers
  • Capacitive sensors
  • Circuit noise
  • Delta-sigma modulation
  • Dynamic range
  • Electrodes
  • Parasitic capacitance
  • Silicon
  • Working environment noise

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

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  • Cite this

    Kulah, H., Chae, J., & Najafi, K. (2003). Noise analysis and characterization of a sigma-delta capacitive silicon microaccelerometer. In TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers (pp. 95-98). [1215261] (TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers; Vol. 1). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/SENSOR.2003.1215261