@inproceedings{5fab20cc3a6e46a7b1594fd457f058f8,
title = "Noise analysis and characterization of a sigma-delta capacitive silicon microaccelerometer",
abstract = "This paper reports a high-sensitivity low-noise capacitive accelerometer system with one micro-g/√Hz resolution. The system operates as a 2nd-order electromechanical Σ-Δ modulator together with the interface electronics. A detailed noise analysis of electromechanical Σ-Δ capacitive accelerometers with a final goal of achieving sub-μg resolution is also presented. The circuit has more than 120 dB dynamic range and can resolve better than 10 aF. The complete module operates from a single 5V supply and has a measured sensitivity of 960 mV/g with a noise floor of 1.08 μg/√Hz in open-loop. This system can resolve better than 10 μg/√Hz in closed-loop.",
keywords = "1f noise, Accelerometers, Capacitive sensors, Circuit noise, Delta-sigma modulation, Dynamic range, Electrodes, Parasitic capacitance, Silicon, Working environment noise",
author = "H. Kulah and Junseok Chae and K. Najafi",
note = "Publisher Copyright: {\textcopyright} 2003 IEEE.; 12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers ; Conference date: 08-06-2003 Through 12-06-2003",
year = "2003",
doi = "10.1109/SENSOR.2003.1215261",
language = "English (US)",
series = "TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "95--98",
booktitle = "TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers",
}