NITROGEN ION IMPLANTATION IN SILICON: STRUCTURE OF THE SUBSURFACE REGION.

Z. Liliental, R. W. Carpenter, D. Fathy, J. C. Kelly

Research output: Chapter in Book/Report/Conference proceedingConference contribution

4 Scopus citations
Original languageEnglish (US)
Title of host publicationMaterials Research Society Symposia Proceedings
PublisherNorth-Holland
Pages525-530
Number of pages6
ISBN (Print)0444009051
StatePublished - Jan 1 1984

Publication series

NameMaterials Research Society Symposia Proceedings
Volume25
ISSN (Print)0272-9172

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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