Next generation of Ge 1-ySn y (y = 0.01-0.09) alloys grown on Si(100) via Ge 3H 8 and SnD 4: Reaction kinetics and tunable emission

G. Grzybowski, R. T. Beeler, L. Jiang, David Smith, John Kouvetakis, Jose Menendez

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92 Scopus citations


Film growth and reaction kinetics studies have shown that trigermane (Ge 3H 8) is a superior Ge source for the epitaxial synthesis of Ge 1-ySn y/Si(100) alloys using ultra-high vacuum chemical vapor deposition. The Ge 3H 8/SnD 4 combination yields 3-4 times higher growth rates than the traditional Ge 2H 6/SnD 4 approach, with film Sn/Ge ratios reflecting the corresponding gas-phase stoichiometries much more closely. These advances have led to optical quality Ge 1-ySn y layers with Sn concentrations up to at least 9 and thicknesses approaching 1 μm. These thick films are found to be crucial for the observation of a strong, tunable photoluminescence signal near the threshold of the predicted direct-indirect bandgap crossover.

Original languageEnglish (US)
Article number072105
JournalApplied Physics Letters
Issue number7
StatePublished - Aug 13 2012

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)


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