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New microfabrication technology for producing sensing cells for MET based seismometer
Hongyu Yu (Inventor)
Arizona State University
Research output
:
Patent
Overview
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Earth & Environmental Sciences
transducer
95%
new technology
83%
electrode
76%
electrolyte
42%
sensor
30%
ion
28%
surface area
23%
hydraulics
19%
directory
19%
geophone
18%
liquid
17%
accelerometer
17%
production cost
17%
etching
16%
semiconductor
16%
durability
14%
tolerance
13%
cost
7%
parameter
5%