New materials for Si-based heterostructure engineering: Synthesis of Si-Ge-C alloys and compounds by UHV-CVD and molecular chemistry

Research output: Contribution to journalArticle

2 Scopus citations
Original languageEnglish (US)
Pages (from-to)113-129
Number of pages17
JournalACS Symposium Series
Volume727
DOIs
StatePublished - 1999

ASJC Scopus subject areas

  • Chemistry(all)
  • Chemical Engineering(all)

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