Abstract
Simulation-based wafer fabrication optimization models require extensive computational time to obtain accurate estimates of output parameters. This research seeks to develop goal-driven optimization methodologies for a variety of semiconductor manufacturing problems using appropriate combinations of "resource-driven" (R-D), "job-driven" (J-D), and Mixed (combination of R-D and J-D) models to reduce simulation run times. The initial phase of this research investigates two issues: a) the use of the R-D simulation control variates for the J-D simulation and b) development of metrics that calibrate the output from the R-D and J-D modeling paradigms. The use of the R-D model as a control variate is proposed to reduce the variance of J-D model output. Second, in order to use the R-D model output to predict the J-D model output, calibration metrics for the R-D and J-D modeling approaches were developed. Initial developments were tested using an M/M/1 queuing system and an M/D/1 queuing system.
Original language | English (US) |
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Title of host publication | Winter Simulation Conference Proceedings |
Editors | E. Yucesan, C.H. Chen, J.L. Snowdon, J.M. Charnes |
Pages | 1414-1422 |
Number of pages | 9 |
Volume | 2 |
State | Published - 2002 |
Event | Proceedings of the 2002 Winter Simulation Conference - San Diego, CA, United States Duration: Dec 8 2002 → Dec 11 2002 |
Other
Other | Proceedings of the 2002 Winter Simulation Conference |
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Country/Territory | United States |
City | San Diego, CA |
Period | 12/8/02 → 12/11/02 |
ASJC Scopus subject areas
- Chemical Health and Safety
- Software
- Safety, Risk, Reliability and Quality
- Applied Mathematics
- Modeling and Simulation