Negative ion yield and sputter yield variations for Cs⁺ bombardment of Si with O₂ gas flooding

Engineering & Materials Science

• Negative ions 100%
• Silicon 58%
• Atoms 45%
• Gases 42%
• Cesium 42%
• Ions 40%
• Oxygen 35%
• Polysilicon 17%
• Oxidation 13%
• Fluxes 11%
• Chemical analysis 9%

Physics & Astronomy

• negative ions 76%
• bombardment 69%
• gases 37%
• silicon 33%
• cesium 26%
• oxygen 18 21%
• atoms 18%
• ions 17%
• oxygen 14%
• oxidation 9%

Chemical Compounds

• Gas 39%
• Reaction Yield 30%
• Caesium Atom 15%
• Negative Secondary Ion 15%
• Surface 14%
• Dioxygen 13%
• Silicon Atom 10%
• Ion 7%
• Oxidation Reaction 4%