Near-field solid immersion lens (SIL) microscope with advanced compact mechanical design

Tao Chen, David Felix, Sang Ki Park, Paul Hauser, Brendan McCarthy, Dror Sarid, Christian Poweleit, Jose Menendez, Tom Milster

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Scopus citations

Abstract

A compact mechanical package is developed for a standard microscope that implements a solid immersion lens (SIL) on a retractable bimorph swing arm. With the compact package mounted on an inverted microscope, far-field and near-field images are obtained at the same location by moving the SIL in place with the swing arm. With white-light incoherent illumination, the resolution of this system for observing digital versatile discs (DVDs) is around 200nm with an effective NA of 1.5. Imaging with the SIL is compared to an atomic force microscopy (AFM) scan.

Original languageEnglish (US)
Title of host publicationProceedings of SPIE - The International Society for Optical Engineering
EditorsB.V.K. Vijaya Kumar, H. Kobori
Pages634-641
Number of pages8
Volume5380
DOIs
StatePublished - 2004
EventOptical Data Storage 2004 - Monterey, CA, United States
Duration: Apr 18 2004Apr 21 2004

Other

OtherOptical Data Storage 2004
CountryUnited States
CityMonterey, CA
Period4/18/044/21/04

Keywords

  • Microscopy
  • Near-field
  • Optical data storage
  • Solid immersion lens

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Condensed Matter Physics

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  • Cite this

    Chen, T., Felix, D., Park, S. K., Hauser, P., McCarthy, B., Sarid, D., Poweleit, C., Menendez, J., & Milster, T. (2004). Near-field solid immersion lens (SIL) microscope with advanced compact mechanical design. In B. V. K. Vijaya Kumar, & H. Kobori (Eds.), Proceedings of SPIE - The International Society for Optical Engineering (Vol. 5380, pp. 634-641) https://doi.org/10.1117/12.557055