Nanostructured silicon substrates of nanopore morphology for buffer-layer free nanoheteroepitaxial growth of InP films

Alan H. Chin, Lin Gan, Cun Zheng Ning

Research output: Contribution to journalArticlepeer-review

Abstract

To reduce the cost of III-V solar cells, a buffer-layer free method of depositing high-quality III-V thin films onto low-cost silicon nanostructured substrates is proposed that is enabled by stress relaxation due to the nanopore morphology of the silicon substrate. As a proof-of-concept test of the proposed method, the nanoheteroepitaxial deposition of high quality InP thin film is examined. By comparing the deposition of InP (under conditions optimized for InP deposition onto InP substrates) onto nanostructured Si(100) substrates with nanopore and nanopillar morphologies, the morphology of nanopores is found to be preferred for the nanoheteroepitaxial deposition of InP films.

Original languageEnglish (US)
Pages (from-to)5559-5562
Number of pages4
JournalCrystEngComm
Volume21
Issue number37
DOIs
StatePublished - 2019

ASJC Scopus subject areas

  • General Chemistry
  • General Materials Science
  • Condensed Matter Physics

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