Nanoscale oxide patterning with electron-solid-gas reactions

Peter Crozier

doi:10.1021/nl071044+

Nanoscale oxide patterning with electron-solid-gas reactions

Peter Crozier

Materials Science and Engineering

Research output: Contribution to journal › Article › peer-review

12 Scopus citations

Abstract

A novel nanoscale oxide patterning technique based on electron beam induced transformation in a gas environment is demonstrated. Localized phase transformation is induced in the surface region of a substrate, resulting in the formation of an oxide pattern that is embedded in the surface. The composition of the transformed region is determined only by the substrate and gas composition. The spatial resolution of the technique is about 15 nm.

Original language	English (US)
Pages (from-to)	2395-2398
Number of pages	4
Journal	Nano Letters
Volume	7
Issue number	8
DOIs	https://doi.org/10.1021/nl071044+
State	Published - Aug 2007

ASJC Scopus subject areas

Bioengineering
General Chemistry
General Materials Science
Condensed Matter Physics
Mechanical Engineering

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10.1021/nl071044+

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@article{fbd729bd18e44f8fa55be1a8c6b139b4,

title = "Nanoscale oxide patterning with electron-solid-gas reactions",

abstract = "A novel nanoscale oxide patterning technique based on electron beam induced transformation in a gas environment is demonstrated. Localized phase transformation is induced in the surface region of a substrate, resulting in the formation of an oxide pattern that is embedded in the surface. The composition of the transformed region is determined only by the substrate and gas composition. The spatial resolution of the technique is about 15 nm.",

author = "Peter Crozier",

year = "2007",

month = aug,

doi = "10.1021/nl071044+",

language = "English (US)",

volume = "7",

pages = "2395--2398",

journal = "Nano Letters",

issn = "1530-6984",

publisher = "American Chemical Society",

number = "8",

}

TY - JOUR

T1 - Nanoscale oxide patterning with electron-solid-gas reactions

AU - Crozier, Peter

PY - 2007/8

Y1 - 2007/8

N2 - A novel nanoscale oxide patterning technique based on electron beam induced transformation in a gas environment is demonstrated. Localized phase transformation is induced in the surface region of a substrate, resulting in the formation of an oxide pattern that is embedded in the surface. The composition of the transformed region is determined only by the substrate and gas composition. The spatial resolution of the technique is about 15 nm.

AB - A novel nanoscale oxide patterning technique based on electron beam induced transformation in a gas environment is demonstrated. Localized phase transformation is induced in the surface region of a substrate, resulting in the formation of an oxide pattern that is embedded in the surface. The composition of the transformed region is determined only by the substrate and gas composition. The spatial resolution of the technique is about 15 nm.

UR - http://www.scopus.com/inward/record.url?scp=34548163189&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=34548163189&partnerID=8YFLogxK

U2 - 10.1021/nl071044+

DO - 10.1021/nl071044+

M3 - Article

C2 - 17658760

AN - SCOPUS:34548163189

SN - 1530-6984

VL - 7

SP - 2395

EP - 2398

JO - Nano Letters

JF - Nano Letters

IS - 8

ER -

Nanoscale oxide patterning with electron-solid-gas reactions

Abstract

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