Nanoscale oxide patterning with electron-solid-gas reactions

Research output: Contribution to journalArticle

10 Citations (Scopus)

Abstract

A novel nanoscale oxide patterning technique based on electron beam induced transformation in a gas environment is demonstrated. Localized phase transformation is induced in the surface region of a substrate, resulting in the formation of an oxide pattern that is embedded in the surface. The composition of the transformed region is determined only by the substrate and gas composition. The spatial resolution of the technique is about 15 nm.

Original languageEnglish (US)
Pages (from-to)2395-2398
Number of pages4
JournalNano Letters
Volume7
Issue number8
DOIs
StatePublished - Aug 2007

Fingerprint

Oxides
Gases
oxides
Electrons
gas composition
Substrates
Chemical analysis
gases
phase transformations
Electron beams
electrons
spatial resolution
Phase transitions
electron beams

ASJC Scopus subject areas

  • Materials Science(all)
  • Electronic, Optical and Magnetic Materials
  • Chemistry (miscellaneous)

Cite this

Nanoscale oxide patterning with electron-solid-gas reactions. / Crozier, Peter.

In: Nano Letters, Vol. 7, No. 8, 08.2007, p. 2395-2398.

Research output: Contribution to journalArticle

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