Nanoscale electron stimulated chemical vapor deposition of Au in an environmental transmission electron microscope

Sutharsan Ketharanathan, Renu Sharma, Jeffery Drucker

Research output: Contribution to journalArticle

7 Citations (Scopus)

Abstract

Nanoscale Au rich dots were deposited on Si O2 and Si3 N4 substrates by decomposing an adsorbed organometallic precursor using a focused electron beam. The precursor, dimethyl acetylacetonate gold ((C H3) 2 (C5 H7 O2) Au), does not react with either substrate without electron irradiation. Deposited feature diameters are larger than that of the electron beam used for deposition by an amount comparable to the secondary electron escape depth. This result suggests that axial secondary electron emission through the surface of a growing feature limits the minimum attainable feature size. Real-time composition analysis during growth using electron energy-loss spectroscopy indicates that mature features entrain significant carbon.

Original languageEnglish (US)
Pages (from-to)2403-2408
Number of pages6
JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume23
Issue number6
DOIs
StatePublished - Nov 2005

Fingerprint

Chemical vapor deposition
Electron beams
Electron microscopes
electron microscopes
vapor deposition
electron beams
Electron irradiation
Electrons
Electron energy loss spectroscopy
Electron emission
secondary emission
Organometallics
Substrates
electron irradiation
electron emission
escape
electrons
energy dissipation
Gold
electron energy

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Surfaces and Interfaces
  • Physics and Astronomy (miscellaneous)

Cite this

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AB - Nanoscale Au rich dots were deposited on Si O2 and Si3 N4 substrates by decomposing an adsorbed organometallic precursor using a focused electron beam. The precursor, dimethyl acetylacetonate gold ((C H3) 2 (C5 H7 O2) Au), does not react with either substrate without electron irradiation. Deposited feature diameters are larger than that of the electron beam used for deposition by an amount comparable to the secondary electron escape depth. This result suggests that axial secondary electron emission through the surface of a growing feature limits the minimum attainable feature size. Real-time composition analysis during growth using electron energy-loss spectroscopy indicates that mature features entrain significant carbon.

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