TY - JOUR
T1 - Nanoscale electron stimulated chemical vapor deposition of Au in an environmental transmission electron microscope
AU - Ketharanathan, Sutharsan
AU - Sharma, Renu
AU - Drucker, Jeffery
N1 - Funding Information:
This work was supported by NSF Grant No. ECS 0103061. The authors appreciate technical assistance from K. Weiss and valuable advice and suggestions from Dr. P. Crozier. All electron microscopy was performed at the John M. Cowley Center for High Resolution Electron Microscopy within the Center for Solid State Science at Arizona State University.
PY - 2005/11
Y1 - 2005/11
N2 - Nanoscale Au rich dots were deposited on Si O2 and Si3 N4 substrates by decomposing an adsorbed organometallic precursor using a focused electron beam. The precursor, dimethyl acetylacetonate gold ((C H3) 2 (C5 H7 O2) Au), does not react with either substrate without electron irradiation. Deposited feature diameters are larger than that of the electron beam used for deposition by an amount comparable to the secondary electron escape depth. This result suggests that axial secondary electron emission through the surface of a growing feature limits the minimum attainable feature size. Real-time composition analysis during growth using electron energy-loss spectroscopy indicates that mature features entrain significant carbon.
AB - Nanoscale Au rich dots were deposited on Si O2 and Si3 N4 substrates by decomposing an adsorbed organometallic precursor using a focused electron beam. The precursor, dimethyl acetylacetonate gold ((C H3) 2 (C5 H7 O2) Au), does not react with either substrate without electron irradiation. Deposited feature diameters are larger than that of the electron beam used for deposition by an amount comparable to the secondary electron escape depth. This result suggests that axial secondary electron emission through the surface of a growing feature limits the minimum attainable feature size. Real-time composition analysis during growth using electron energy-loss spectroscopy indicates that mature features entrain significant carbon.
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U2 - 10.1116/1.2122847
DO - 10.1116/1.2122847
M3 - Article
AN - SCOPUS:29044432180
SN - 1071-1023
VL - 23
SP - 2403
EP - 2408
JO - Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
JF - Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
IS - 6
ER -