Nanoring formation by direct-write inorganic electron-beam lithography

N. Jiang; G. G. Hembree; John Spence; J. Qiu; F. J. Garcia de Abajo; J. Silcox

doi:10.1063/1.1592895

Nanoring formation by direct-write inorganic electron-beam lithography

N. Jiang, G. G. Hembree, John Spence, J. Qiu, F. J. Garcia de Abajo, J. Silcox

Physics

Research output: Contribution to journal › Article › peer-review

47 Scopus citations

Abstract

A method of forming patterned nanometer scale rings by studying their composition by nanometer resolution electron energy loss spectroscopy (EELS) and electron diffraction was discussed. The method was based on rearrangement of the bonding in silicate glasses induced by high-energy electron excitation. Scanning transmission electron microscope (STEM) lithography was used to make structures other than rings, such as holes, rods and dots.

Original language	English (US)
Pages (from-to)	551-553
Number of pages	3
Journal	Applied Physics Letters
Volume	83
Issue number	3
DOIs	https://doi.org/10.1063/1.1592895
State	Published - Jul 21 2003

ASJC Scopus subject areas

Physics and Astronomy (miscellaneous)

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10.1063/1.1592895

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title = "Nanoring formation by direct-write inorganic electron-beam lithography",

abstract = "A method of forming patterned nanometer scale rings by studying their composition by nanometer resolution electron energy loss spectroscopy (EELS) and electron diffraction was discussed. The method was based on rearrangement of the bonding in silicate glasses induced by high-energy electron excitation. Scanning transmission electron microscope (STEM) lithography was used to make structures other than rings, such as holes, rods and dots.",

author = "N. Jiang and Hembree, {G. G.} and John Spence and J. Qiu and {Garcia de Abajo}, {F. J.} and J. Silcox",

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AU - Jiang, N.

AU - Hembree, G. G.

AU - Spence, John

AU - Qiu, J.

AU - Garcia de Abajo, F. J.

AU - Silcox, J.

PY - 2003/7/21

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N2 - A method of forming patterned nanometer scale rings by studying their composition by nanometer resolution electron energy loss spectroscopy (EELS) and electron diffraction was discussed. The method was based on rearrangement of the bonding in silicate glasses induced by high-energy electron excitation. Scanning transmission electron microscope (STEM) lithography was used to make structures other than rings, such as holes, rods and dots.

AB - A method of forming patterned nanometer scale rings by studying their composition by nanometer resolution electron energy loss spectroscopy (EELS) and electron diffraction was discussed. The method was based on rearrangement of the bonding in silicate glasses induced by high-energy electron excitation. Scanning transmission electron microscope (STEM) lithography was used to make structures other than rings, such as holes, rods and dots.

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Nanoring formation by direct-write inorganic electron-beam lithography

Abstract

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