Nanoring formation by direct-write inorganic electron-beam lithography

N. Jiang, G. G. Hembree, John Spence, J. Qiu, F. J. Garcia de Abajo, J. Silcox

Research output: Contribution to journalArticlepeer-review

44 Scopus citations

Abstract

A method of forming patterned nanometer scale rings by studying their composition by nanometer resolution electron energy loss spectroscopy (EELS) and electron diffraction was discussed. The method was based on rearrangement of the bonding in silicate glasses induced by high-energy electron excitation. Scanning transmission electron microscope (STEM) lithography was used to make structures other than rings, such as holes, rods and dots.

Original languageEnglish (US)
Pages (from-to)551-553
Number of pages3
JournalApplied Physics Letters
Volume83
Issue number3
DOIs
StatePublished - Jul 21 2003

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

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