Nanochemistry and structure of Zr and Hf based high dielectric constant films

M. Floyd, Ray Carpenter, Sandwip Dey, S. Marcus, H. De Waard, C. Werkhoven

Research output: Contribution to journalArticle

2 Scopus citations
Original languageEnglish (US)
Pages (from-to)466-467
Number of pages2
JournalMicroscopy and Microanalysis
Volume9
Issue numberSUPPL. 2
StatePublished - Sep 4 2003

ASJC Scopus subject areas

  • Instrumentation

Cite this

Floyd, M., Carpenter, R., Dey, S., Marcus, S., De Waard, H., & Werkhoven, C. (2003). Nanochemistry and structure of Zr and Hf based high dielectric constant films. Microscopy and Microanalysis, 9(SUPPL. 2), 466-467.