Nanochemistry and structure of Zr and Hf based high dielectric constant films

M. Floyd, Ray Carpenter, Sandwip Dey, S. Marcus, H. De Waard, C. Werkhoven

Research output: Contribution to journalArticlepeer-review

2 Scopus citations
Original languageEnglish (US)
Pages (from-to)466-467
Number of pages2
JournalMicroscopy and Microanalysis
Volume9
Issue numberSUPPL. 2
StatePublished - Sep 4 2003

ASJC Scopus subject areas

  • Instrumentation

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