Nanochemistry and structure of Zr and Hf based high dielectric constant films

M. Floyd, Ray Carpenter, Sandwip Dey, S. Marcus, H. De Waard, C. Werkhoven

Research output: Contribution to journal › Article › peer-review

Original language	English (US)
Pages (from-to)	466-467
Number of pages	2
Journal	Microscopy and Microanalysis
Volume	9
Issue number	SUPPL. 2
State	Published - Sep 4 2003

ASJC Scopus subject areas

@article{5134192426d14a2fa9dcd45e688a3a5a,

title = "Nanochemistry and structure of Zr and Hf based high dielectric constant films",

author = "M. Floyd and Ray Carpenter and Sandwip Dey and S. Marcus and {De Waard}, H. and C. Werkhoven",

year = "2003",

month = sep,

day = "4",

language = "English (US)",

volume = "9",

pages = "466--467",

journal = "Microscopy and Microanalysis",

issn = "1431-9276",

publisher = "Cambridge University Press",

number = "SUPPL. 2",

}

TY - JOUR

T1 - Nanochemistry and structure of Zr and Hf based high dielectric constant films

AU - Floyd, M.

AU - Carpenter, Ray

AU - Dey, Sandwip

AU - Marcus, S.

AU - De Waard, H.

AU - Werkhoven, C.

PY - 2003/9/4

Y1 - 2003/9/4

UR - http://www.scopus.com/inward/record.url?scp=0042423458&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0042423458&partnerID=8YFLogxK

M3 - Article

AN - SCOPUS:0042423458

VL - 9

SP - 466

EP - 467

JO - Microscopy and Microanalysis

JF - Microscopy and Microanalysis

SN - 1431-9276

IS - SUPPL. 2

ER -