Abstract

We present an in-situ method for MEMS (micro-electromechanical systems) microphone sensitivity optimization via the growth/retraction of nano-electrodeposits to achieve high directionality in hearing aid applications. Using a DC bias at room temperature, nano-electrodeposits are electrochemically deposited and dissolved on a Ag-doped Ge-Se solid electrolyte film on a microphone diaphragm. The growth and retraction of the nano-electrodeposits generate mass/stress redistribution on the diaphragm, tuning the microphone sensitivity to incoming acoustic sources. Acoustic measurements demonstrate that the directional microphone can achieve a 1.3 dB Directivity Index (DI) improvement upon nano-electrodeposit growth and 0.9 dB DI reversal on nano-electrodeposit retraction.

Original languageEnglish (US)
Title of host publicationNanotechnology 2009
Subtitle of host publicationFabrication, Particles, Characterization, MEMS, Electronics and Photonics - Technical Proceedings of the 2009 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2009
Pages436-439
Number of pages4
StatePublished - Nov 26 2009
EventNanotechnology 2009: Fabrication, Particles, Characterization, MEMS, Electronics and Photonics - 2009 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2009 - Houston, TX, United States
Duration: May 3 2009May 7 2009

Publication series

NameNanotechnology 2009: Fabrication, Particles, Characterization, MEMS, Electronics and Photonics - Technical Proceedings of the 2009 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2009
Volume1

Other

OtherNanotechnology 2009: Fabrication, Particles, Characterization, MEMS, Electronics and Photonics - 2009 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2009
CountryUnited States
CityHouston, TX
Period5/3/095/7/09

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Keywords

  • Directivity index
  • Micro-electromechanical systems microphone
  • Nano-electrodeposits growth and retraction
  • Sensitivity adjustment
  • Sensitivity tuning

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics

Cite this

Je, S. S., Kim, J., Kozicki, M., & Chae, J. (2009). Nano-electrodeposits on MEMS directional microphones for hearing aid optimization. In Nanotechnology 2009: Fabrication, Particles, Characterization, MEMS, Electronics and Photonics - Technical Proceedings of the 2009 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2009 (pp. 436-439). (Nanotechnology 2009: Fabrication, Particles, Characterization, MEMS, Electronics and Photonics - Technical Proceedings of the 2009 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2009; Vol. 1).