Abstract

We present an in-situ method for MEMS (micro-electromechanical systems) microphone sensitivity optimization via the growth/retraction of nano-electrodeposits to achieve high directionality in hearing aid applications. Using a DC bias at room temperature, nano-electrodeposits are electrochemically deposited and dissolved on a Ag-doped Ge-Se solid electrolyte film on a microphone diaphragm. The growth and retraction of the nano-electrodeposits generate mass/stress redistribution on the diaphragm, tuning the microphone sensitivity to incoming acoustic sources. Acoustic measurements demonstrate that the directional microphone can achieve a 1.3 dB Directivity Index (DI) improvement upon nano-electrodeposit growth and 0.9 dB DI reversal on nano-electrodeposit retraction.

Original languageEnglish (US)
Title of host publicationNanotechnology 2009: Fabrication, Particles, Characterization, MEMS, Electronics and Photonics - Technical Proceedings of the 2009 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2009
Pages436-439
Number of pages4
Volume1
StatePublished - 2009
EventNanotechnology 2009: Fabrication, Particles, Characterization, MEMS, Electronics and Photonics - 2009 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2009 - Houston, TX, United States
Duration: May 3 2009May 7 2009

Other

OtherNanotechnology 2009: Fabrication, Particles, Characterization, MEMS, Electronics and Photonics - 2009 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2009
CountryUnited States
CityHouston, TX
Period5/3/095/7/09

Fingerprint

Hearing aids
Microphones
hearing
microphones
microelectromechanical systems
MEMS
optimization
directivity
diaphragms
Diaphragms
Acoustics
acoustic measurement
sensitivity
Solid electrolytes
solid electrolytes
Tuning
direct current
tuning
acoustics
room temperature

Keywords

  • Directivity index
  • Micro-electromechanical systems microphone
  • Nano-electrodeposits growth and retraction
  • Sensitivity adjustment
  • Sensitivity tuning

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics

Cite this

Je, S. S., Kim, J., Kozicki, M., & Chae, J. (2009). Nano-electrodeposits on MEMS directional microphones for hearing aid optimization. In Nanotechnology 2009: Fabrication, Particles, Characterization, MEMS, Electronics and Photonics - Technical Proceedings of the 2009 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2009 (Vol. 1, pp. 436-439)

Nano-electrodeposits on MEMS directional microphones for hearing aid optimization. / Je, Sang Soo; Kim, Jeonghwan; Kozicki, Michael; Chae, Junseok.

Nanotechnology 2009: Fabrication, Particles, Characterization, MEMS, Electronics and Photonics - Technical Proceedings of the 2009 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2009. Vol. 1 2009. p. 436-439.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Je, SS, Kim, J, Kozicki, M & Chae, J 2009, Nano-electrodeposits on MEMS directional microphones for hearing aid optimization. in Nanotechnology 2009: Fabrication, Particles, Characterization, MEMS, Electronics and Photonics - Technical Proceedings of the 2009 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2009. vol. 1, pp. 436-439, Nanotechnology 2009: Fabrication, Particles, Characterization, MEMS, Electronics and Photonics - 2009 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2009, Houston, TX, United States, 5/3/09.
Je SS, Kim J, Kozicki M, Chae J. Nano-electrodeposits on MEMS directional microphones for hearing aid optimization. In Nanotechnology 2009: Fabrication, Particles, Characterization, MEMS, Electronics and Photonics - Technical Proceedings of the 2009 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2009. Vol. 1. 2009. p. 436-439
Je, Sang Soo ; Kim, Jeonghwan ; Kozicki, Michael ; Chae, Junseok. / Nano-electrodeposits on MEMS directional microphones for hearing aid optimization. Nanotechnology 2009: Fabrication, Particles, Characterization, MEMS, Electronics and Photonics - Technical Proceedings of the 2009 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2009. Vol. 1 2009. pp. 436-439
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