@inproceedings{7c7c126c46dd408490ed507984da272b,
title = "Nano-electrodeposits on MEMS directional microphones for hearing aid optimization",
abstract = "We present an in-situ method for MEMS (micro-electromechanical systems) microphone sensitivity optimization via the growth/retraction of nano-electrodeposits to achieve high directionality in hearing aid applications. Using a DC bias at room temperature, nano-electrodeposits are electrochemically deposited and dissolved on a Ag-doped Ge-Se solid electrolyte film on a microphone diaphragm. The growth and retraction of the nano-electrodeposits generate mass/stress redistribution on the diaphragm, tuning the microphone sensitivity to incoming acoustic sources. Acoustic measurements demonstrate that the directional microphone can achieve a 1.3 dB Directivity Index (DI) improvement upon nano-electrodeposit growth and 0.9 dB DI reversal on nano-electrodeposit retraction.",
keywords = "Directivity index, Micro-electromechanical systems microphone, Nano-electrodeposits growth and retraction, Sensitivity adjustment, Sensitivity tuning",
author = "Je, {Sang Soo} and Jeonghwan Kim and Michael Kozicki and Junseok Chae",
year = "2009",
language = "English (US)",
isbn = "9781439817827",
series = "Nanotechnology 2009: Fabrication, Particles, Characterization, MEMS, Electronics and Photonics - Technical Proceedings of the 2009 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2009",
pages = "436--439",
booktitle = "Nanotechnology 2009",
note = "Nanotechnology 2009: Fabrication, Particles, Characterization, MEMS, Electronics and Photonics - 2009 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2009 ; Conference date: 03-05-2009 Through 07-05-2009",
}