TY - JOUR
T1 - Multislice theory of fast electron scattering incorporating atomic inner-shell ionization
AU - Dwyer, C.
N1 - Funding Information:
The author would like to thank A.F. Moodie, J. Etheridge and P. Rez for interesting and useful discussions relating to this work. Funding by the EPSRC (Grant GR/R42276/01), Cambridge Commonwealth Trust and Universities UK is gratefully acknowledged.
PY - 2005/9
Y1 - 2005/9
N2 - It is demonstrated how atomic inner-shell ionization can be incorporated into a multislice theory of fast electron scattering. The resulting theory therefore accounts for both inelastic scattering due to inner-shell ionization and dynamical elastic scattering. The theory uses a description of the ionization process based on the angular momentum representation for both the initial and final states of the atomic electron. For energy losses near threshold, only a small number of independent states of the ejected atomic electron need to be considered, reducing demands on computing time, and eliminating the need for tabulated inelastic scattering factors. The theory is used to investigate the influence of the collection aperture size on the spatial origin of the silicon K-shell EELS signal generated by a STEM probe. The validity of a so-called local approximation is also considered.
AB - It is demonstrated how atomic inner-shell ionization can be incorporated into a multislice theory of fast electron scattering. The resulting theory therefore accounts for both inelastic scattering due to inner-shell ionization and dynamical elastic scattering. The theory uses a description of the ionization process based on the angular momentum representation for both the initial and final states of the atomic electron. For energy losses near threshold, only a small number of independent states of the ejected atomic electron need to be considered, reducing demands on computing time, and eliminating the need for tabulated inelastic scattering factors. The theory is used to investigate the influence of the collection aperture size on the spatial origin of the silicon K-shell EELS signal generated by a STEM probe. The validity of a so-called local approximation is also considered.
KW - Electron energy loss spectroscopy (EELS)
KW - Inelastic electron scattering theory
KW - Scanning transmission electron microscopy (STEM)
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U2 - 10.1016/j.ultramic.2005.03.005
DO - 10.1016/j.ultramic.2005.03.005
M3 - Article
C2 - 15876497
AN - SCOPUS:20544473020
SN - 0304-3991
VL - 104
SP - 141
EP - 151
JO - Ultramicroscopy
JF - Ultramicroscopy
IS - 2
ER -