Multislice theory of fast electron scattering incorporating atomic inner-shell ionization

Research output: Contribution to journalArticle

56 Citations (Scopus)

Abstract

It is demonstrated how atomic inner-shell ionization can be incorporated into a multislice theory of fast electron scattering. The resulting theory therefore accounts for both inelastic scattering due to inner-shell ionization and dynamical elastic scattering. The theory uses a description of the ionization process based on the angular momentum representation for both the initial and final states of the atomic electron. For energy losses near threshold, only a small number of independent states of the ejected atomic electron need to be considered, reducing demands on computing time, and eliminating the need for tabulated inelastic scattering factors. The theory is used to investigate the influence of the collection aperture size on the spatial origin of the silicon K-shell EELS signal generated by a STEM probe. The validity of a so-called local approximation is also considered.

Original languageEnglish (US)
Pages (from-to)141-151
Number of pages11
JournalUltramicroscopy
Volume104
Issue number2
DOIs
StatePublished - Sep 2005
Externally publishedYes

Fingerprint

Electron scattering
Ionization
electron scattering
Inelastic scattering
ionization
inelastic scattering
Elastic scattering
Electrons
Angular momentum
Electron energy loss spectroscopy
Silicon
Energy dissipation
elastic scattering
electrons
angular momentum
energy dissipation
apertures
thresholds
probes
silicon

Keywords

  • Electron energy loss spectroscopy (EELS)
  • Inelastic electron scattering theory
  • Scanning transmission electron microscopy (STEM)

ASJC Scopus subject areas

  • Materials Science(all)
  • Instrumentation

Cite this

Multislice theory of fast electron scattering incorporating atomic inner-shell ionization. / Dwyer, Christian.

In: Ultramicroscopy, Vol. 104, No. 2, 09.2005, p. 141-151.

Research output: Contribution to journalArticle

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