Multislice theory of fast electron scattering incorporating atomic inner-shell ionization

C. Dwyer

Research output: Contribution to journalArticlepeer-review

67 Scopus citations


It is demonstrated how atomic inner-shell ionization can be incorporated into a multislice theory of fast electron scattering. The resulting theory therefore accounts for both inelastic scattering due to inner-shell ionization and dynamical elastic scattering. The theory uses a description of the ionization process based on the angular momentum representation for both the initial and final states of the atomic electron. For energy losses near threshold, only a small number of independent states of the ejected atomic electron need to be considered, reducing demands on computing time, and eliminating the need for tabulated inelastic scattering factors. The theory is used to investigate the influence of the collection aperture size on the spatial origin of the silicon K-shell EELS signal generated by a STEM probe. The validity of a so-called local approximation is also considered.

Original languageEnglish (US)
Pages (from-to)141-151
Number of pages11
Issue number2
StatePublished - Sep 2005
Externally publishedYes


  • Electron energy loss spectroscopy (EELS)
  • Inelastic electron scattering theory
  • Scanning transmission electron microscopy (STEM)

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Instrumentation


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