TY - GEN
T1 - Multiple sensor arrays for single cell metabolic analysis
AU - Song, Ganquan
AU - Shetty, Rishabh M.
AU - Zhu, Haixin
AU - Ashili, Shashanka
AU - Zhang, Liqiang
AU - Kim, Grace
AU - Shabilla, Andrew
AU - Teller, Wacey
AU - Mei, Qian
AU - Kelbauskas, Laimonas
AU - Tian, Yanqing
AU - Wang, Hong
AU - Johnson, Roger H.
AU - Meldrum, Deirdre
PY - 2013/1/1
Y1 - 2013/1/1
N2 - We present the design, fabrication and characterization of multiple micro-pocket lid arrays used in live single cell metabolic analysis. In previous work we reported a platform for quantifying single cell oxygen consumption rates realized using a fused silica deep wet etching process. Here we extend that work to a dual-depth wet etching process for microfabrication of multiple sensor trapping (MST) lid arrays. Each lid comprises multiple micro-pockets. Oxygen, pH, other extra-cellular sensors, and reference dye were deposited in the pockets. In order to achieve simultaneous monitoring of multiple metabolic parameters, the lid array serves to hermetically seal arrays of microwells, each containing a single cell. The dual-depth etching process we developed can be easily applied to other glass-based microfabrication purposes requiring dual- or multiple-depth microstructures.
AB - We present the design, fabrication and characterization of multiple micro-pocket lid arrays used in live single cell metabolic analysis. In previous work we reported a platform for quantifying single cell oxygen consumption rates realized using a fused silica deep wet etching process. Here we extend that work to a dual-depth wet etching process for microfabrication of multiple sensor trapping (MST) lid arrays. Each lid comprises multiple micro-pockets. Oxygen, pH, other extra-cellular sensors, and reference dye were deposited in the pockets. In order to achieve simultaneous monitoring of multiple metabolic parameters, the lid array serves to hermetically seal arrays of microwells, each containing a single cell. The dual-depth etching process we developed can be easily applied to other glass-based microfabrication purposes requiring dual- or multiple-depth microstructures.
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U2 - 10.1109/ICSENS.2013.6688453
DO - 10.1109/ICSENS.2013.6688453
M3 - Conference contribution
AN - SCOPUS:84893984469
SN - 9781467346405
T3 - Proceedings of IEEE Sensors
BT - IEEE SENSORS 2013 - Proceedings
PB - IEEE Computer Society
T2 - 12th IEEE SENSORS 2013 Conference
Y2 - 4 November 2013 through 6 November 2013
ER -