MULTIPLE SCATTERING OF FAST ELECTRONS IN THIN SPECIMENS.

Research output: Chapter in Book/Report/Conference proceedingChapter

1 Citation (Scopus)

Abstract

Multiple scattering of fast (0. 1-3 MeV) electrons in transmission electron microscopy has important consequences for various aspects of microanalysis. The multiple scattering in the energy loss spectrum can have effects on edge visibility and quantitative results. The spreading of the beam due to multiple scattering is important for determining the spatial resolution of x-ray microanalysis. The objective of this work is to show that one can take all these effects into consideration by solving the transport equation assuming small angle scattering.

Original languageEnglish (US)
Title of host publicationProceedings, Annual Conference - Microbeam Analysis Society
Place of PublicationSan Francisco Press, Calif
PublisherInc
Pages117-118
Number of pages2
StatePublished - 1979
Externally publishedYes
EventProc Annu Conf Microbeam Anal Soc 14th - San Antonio, Tex
Duration: Aug 12 1979Aug 17 1979

Other

OtherProc Annu Conf Microbeam Anal Soc 14th
CitySan Antonio, Tex
Period8/12/798/17/79

Fingerprint

Multiple scattering
Microanalysis
Electrons
Visibility
Energy dissipation
Scattering
Transmission electron microscopy
X rays

ASJC Scopus subject areas

  • Engineering(all)

Cite this

Rez, P. (1979). MULTIPLE SCATTERING OF FAST ELECTRONS IN THIN SPECIMENS. In Proceedings, Annual Conference - Microbeam Analysis Society (pp. 117-118). San Francisco Press, Calif: Inc.

MULTIPLE SCATTERING OF FAST ELECTRONS IN THIN SPECIMENS. / Rez, Peter.

Proceedings, Annual Conference - Microbeam Analysis Society. San Francisco Press, Calif : Inc, 1979. p. 117-118.

Research output: Chapter in Book/Report/Conference proceedingChapter

Rez, P 1979, MULTIPLE SCATTERING OF FAST ELECTRONS IN THIN SPECIMENS. in Proceedings, Annual Conference - Microbeam Analysis Society. Inc, San Francisco Press, Calif, pp. 117-118, Proc Annu Conf Microbeam Anal Soc 14th, San Antonio, Tex, 8/12/79.
Rez P. MULTIPLE SCATTERING OF FAST ELECTRONS IN THIN SPECIMENS. In Proceedings, Annual Conference - Microbeam Analysis Society. San Francisco Press, Calif: Inc. 1979. p. 117-118
Rez, Peter. / MULTIPLE SCATTERING OF FAST ELECTRONS IN THIN SPECIMENS. Proceedings, Annual Conference - Microbeam Analysis Society. San Francisco Press, Calif : Inc, 1979. pp. 117-118
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